Magnetic recording medium and a method of manufacturing the same
View Patent ↗A magnetic recording medium and a method of manufacturing a magnetic recording medium are provided, in which degradation of wear resistance against a magnetic head and performances of the medium is restrained, and metal dissolving out of the magnetic recording layer and degradation of corrosion resistance due to low coverage of a protective layer are suppressed. The method of manufacturing provides a magnetic recording medium having a convex portion of a magnetic recording layer for recording information and a concave portion without a recording function on a disk substrate. An ALD protective layer is formed on the magnetic recording medium using an ALD method. The magnetic recording medium has a convex portion of a magnetic recording layer for recording information and a concave portion without a recording function on a disk substrate, and has a protective layer formed by an ALD method on the concavo-convex pattern.
1. A method of manufacturing a magnetic recording medium having a concavo-convex pattern with a convex portion for recording information and a concave portion without a recording function, the method comprising:
forming an ALD protective layer on the magnetic recording medium using an ALD (atomic layer deposition) method, wherein the ALD protective layer is formed on side walls of the convex portions of the magnetic recording layer and on bottoms of the concave portions of the concavo-convex pattern and is lacking on the tops of the convex portions, wherein the ALD protective layer comprises a material selected from a group consisting of oxides, nitrides and a metal film, and
forming a carbon protective layer composed of a DLC film at least on tops of the convex portions of the magnetic recording layer, wherein the carbon protective layer composed of a DLC film is formed on the ALD protective layer on the side wall of the convex portions of the magnetic recording layer.
2. The method of manufacturing a magnetic recording medium according to claim 1 , wherein the carbon protective layer composed of a DLC film additionally is formed on the ALD protective layer on the bottom of the concave portions of the magnetic recording layer.
3. The method of manufacturing a magnetic recording medium according to claim 1 , wherein the carbon protective layer is formed by means of a plasma CVD method.
4. The method of manufacturing a magnetic recording medium according to claim 1 , wherein the ALD protective layer is formed by masking the tops of the concave portions of the magnetic recording layer.
5. The method of manufacturing a magnetic recording medium according to claim 1 , wherein the ALD protective layer is formed following a configuration of the magnetic recording layer.
6. The method of manufacturing a magnetic recording medium according to claim 5 , wherein a carbon protective layer is formed on the ALD protective layer by means of a sputtering method.
7. The method of manufacturing a magnetic recording medium according to claim 1 , wherein a configuration of the concavo-convex pattern is a configuration of lines and spacings or a configuration of dots.
8. The method of manufacturing a magnetic recording medium according to claim 1 , wherein the ALD protective layer is composed of a material selected from a group consisting of SiO 2 , Al 2 O 3 , TiO 2 , HfO 2 , TiN, AlN, WN, and a metal film.
9. A magnetic recording medium comprising
a concavo-convex pattern having a convex portion for recording information, and a concave portion without a recording function, and a protective layer on the convex portion and the concave portion, wherein the protective layer comprises an ALD protective layer formed by means of an ALD method, the ALD protective layer comprising a material selected from a group consisting of oxides, nitrides and a metal film,
wherein the ALD protective layer is formed at least on side walls of the convex portions of the magnetic recording layer and is lacking on the tops of the convex portions and wherein the ALD protective layer is formed further on bottoms of the concave portions of the concavo-convex pattern, and
wherein the protective layer further comprises a carbon protective layer composed of a DLC film which is formed at least on tops of the convex portions of the magnetic recording layer, wherein the carbon protective layer composed of a DLC film is formed on the ALD protective layer on the side wall of the convex portions of the magnetic recording layer.
10. The magnetic recording medium according to claim 9 , wherein the carbon protective layer composed of a DLC film is formed on the ALD protective layer on the bottom of the concave portions of the magnetic recording layer.
11. The magnetic recording medium according to claim 9 , wherein a taper angle of the convex portions of the concavo-convex pattern is at least 60 degrees, and the ALD protective layer is formed on the side walls of the convex portions with the taper angle of at least 60 degrees.
12. The magnetic recording medium according to claim 9 , wherein the ALD protective layer is formed following a configuration of the magnetic recording layer.
13. The magnetic recording medium according to claim 9 , wherein a configuration of the concavo-convex pattern is a configuration of lines and spacings or a configuration of dots.
14. The magnetic recording medium according to claim 9 , wherein the ALD protective layer is composed of a material selected from a group consisting of SiO 2 , Al 2 O 3 , TiO 2 , HfO 2 , TiN, AlN, WN, and a metal film.