Magnetoresistive sensor having quantum well structure and a trapping layer for preventing charge carrier migration
View Patent ↗A Lorentz Magnetoresistive sensor having an ultrathin trapping layer disposed between a quantum well structure and a surface of the sensor. The trapping layer prevents charge carriers from the surface of the sensor from affecting the quantum well structure. This allows the quantum well structure to be formed much closer to the surface of the sensor, and therefore, much closer to the magnetic field source, greatly improving sensor performance. A Lorentz Magnetoresistive sensor having a top gate electrode to hinder surface charge carriers diffusing into the quantum well, said top gate electrode being either a highly conductive ultrathin patterned metal layer or a patterned monoatomic layer of graphene.
1. A magnetoresistive sensor, comprising:
first and second barrier layers;
a quantum well structure sandwiched between the first and second barrier layers; and
an ultrathin trapping layer disposed between a surface of the sensor and the first and second barrier layers and quantum well structure, the trapping layer preventing migration of charge carriers from the surface of the sensor to the quantum well structure.
2. A magnetoresistive sensor as in claim 1 wherein the quantum well structure comprises a two dimensional electron gas.
3. A magnetoresistive sensor as in claim 1 wherein the quantum well structure comprises a two dimensional hole gas.
4. A magnetoresistive sensor as in claim 1 wherein the trapping layer comprises an oxide layer.
5. A magnetoresistive sensor as in claim 1 wherein the trapping layer comprises a large bandgap semiconductor material.
6. A magnetoresistive sensor as in claim 1 wherein the trapping layer comprises an ion implanted AlSb barrier layer.
7. A magnetoresistive sensor as in claim 6 wherein the ion implantation is performed through a photolithographically defined mask.
8. A magnetoresistive sensor as in claim 1 wherein the trapping layer comprises an ion implanted InAs capping layer.
9. A magnetoresistive sensor as in claim 1 further comprising a biased metal gate electrode formed on a capping layer.
10. A magnetoresistive sensor as in claim 9 wherein the capping layer comprises InAs or GaSb.
11. A magnetoresistive sensor as in claim 9 wherein the gate electrode is patterned to define a modulation of a sheet carrier density in the quantum well.
12. A magnetoresistive sensor as in claim 11 wherein the gate electrode material is highly conducting metal such as Au, Pt, Rh and their alloys.
13. A magnetoresistive sensor as in claim 1 further comprising a capping layer formed over the trapping layer, between the trapping layer and the surface of the sensor.
14. A magnetoresistive sensor as in claim 1 wherein the first and second barrier layers each comprise AlSb and the quantum well structure comprises InAs.
15. A magnetoresistive sensor, comprising:
first and second barrier layers;
a quantum well structure sandwiched between the first and second barrier layers; and
an ultrathin trapping layer disposed between a surface of the sensor and the first and second barrier layers and quantum well structure, the trapping layer preventing migration of charge carriers from the surface of the sensor to the quantum well structure; wherein the trapping layer comprises Si or Be-doped AlSb.
16. A magnetoresistive sensor, comprising:
first and second barrier layers;
a quantum well structure sandwiched between the first and second barrier layers; and
an ultrathin trapping layer disposed between a surface of the sensor and the first and second barrier layers and quantum well structure, the trapping layer preventing migration of charge carriers from the surface of the sensor to the quantum well structure; wherein the trapping layer comprises a Si or Be-doped InAs.
17. A magnetoresistive sensor, comprising:
first and second barrier layers;
a quantum well structure sandwiched between the first and second barrier layers; and
an ultrathin trapping layer disposed between a surface of the sensor and the first and second barrier layers and quantum well structure, the trapping layer preventing migration of charge carriers from the surface of the sensor to the quantum well structure; wherein the quantum well structure is located a distance of less than 7 nm from the surface of the sensor.