SAW architecture with series connected interdigitated transducers
View Patent ↗An acoustic cavity of a surface acoustic wave (SAW) architecture is defined on a piezoelectric substrate by two acoustic reflectors are formed on a piezoelectric substrate. The surface acoustic wave architecture may include at least one alpha interdigitated transducer (IDT) at least three beta IDTs which are placed in acoustic series within the acoustic cavity. The alpha IDT is electrically coupled to a first interface. The beta IDTs are coupled in electrical and acoustic series and are associated with a second interface. At least three beta IDTs are adjacent one another. An additional reflector or an alpha IDT may be placed between two of the beta IDTs.
1. A method for forming a surface acoustic wave device comprising:
providing a piezoelectric substrate;
forming on the piezoelectric substrate two acoustic reflectors defining an acoustic cavity between the acoustic reflectors;
forming at least one alpha interdigitated transducer (IDT) on the piezoelectric substrate between the acoustic reflectors and electrically coupled to a first interface; and
forming at least three beta IDTs on the piezoelectric substrate between the acoustic reflectors and electrically coupled to a second interface, such that each of the at least three beta IDTs are coupled in electrical series with each other and aligned in acoustic series with each other and with the at least one alpha IDT within the acoustic cavity.
2. The method of claim 1 wherein adjacent edge portions of at least two of the at least three beta IDTs are chirped.
3. The method of claim 2 wherein center portions of the at least two of the at least three beta IDTs are not chirped.
4. The method of claim 1 wherein the at least three beta IDTs are adjacent each other and comprise at least one inner beta IDT between two outer beta IDTs, a center portion of the at least one inner beta IDT being chirped.
5. The method of claim 4 wherein edge portions of the at least one inner beta IDT are not chirped.
6. The method of claim 4 wherein center portions of the at least two outer beta IDTs are not chirped.