Imprinting device, method of fabricating the same, and method of patterning thin film using the same
View Patent ↗An imprinting device includes a first substrate, a light blocking layer formed on the first substrate corresponding to a light blocking area, and a patterned layer formed on the first substrate. The patterned layer includes an etch pattern and a flow control pattern formed on the first substrate corresponding to a transmittance area and the light blocking area, respectively. When the patterned layer presses a resin layer, the resin layer pressed by the etch pattern moves towards the flow control pattern or a photosensitive resin layer pressed by the flow control pattern moves towards the etch pattern according to a shape of the flow control pattern. Thus, when the shape of the flow control pattern is controlled, the resin layer pressed by the patterned layer may be formed with a uniform thickness.
1. An imprinting device comprising:
a first substrate including a transmittance area through which a light is transmitted and at least one light blocking area blocking the light;
a light blocking layer having at least one alignment key formed by partially removing a portion therefrom and being formed on the first substrate corresponding to the at least one light blocking area, the light blocking layer disposed on the first substrate corresponding to between the transmittance area and an adjacent transmittance area; and
a patterned layer formed on the first substrate to press an imprinting object,
wherein the light blocking layer is disposed intermediate the patterned layer and the first substrate, and
wherein the patterned layer comprises:
an etch pattern formed on the first substrate corresponding to the transmittance area and the adjacent transmittance area; and
a flow control pattern formed on the first substrate corresponding to the at least one light blocking area while covering the light blocking layer to control a flow of the imprinting object that is pressed by the patterned layer.
2. The imprinting device of claim 1 , wherein the etch pattern has a concavo-convex shape.
3. The imprinting device of claim 2 , wherein the flow control pattern has a same shape as that of the etch pattern.
4. The imprinting device of claim 2 , wherein the flow control pattern has a convex shape, and the imprinting object pressed by the flow control pattern moves towards the etch pattern.
5. The imprinting device of claim 2 , wherein the flow control pattern has a concave shape, and the imprinting object pressed by the etch pattern moves towards the flow control pattern.
6. The imprinting device of claim 1 , wherein the patterned layer is a cured resin layer.
7. The imprinting device of claim 1 , wherein the patterned layer covered the light blocking layer on the first substrate.
8. The imprinting device of claim 1 , wherein the flow control pattern has a plurality of concave-convex portions.
9. The imprinting device of claim 8 , wherein the plurality of concave-convex portions are disposed between the etch pattern and an adjacent etch pattern.