Thin film transistor array panel and method for manufacturing the same
View Patent ↗The invention provides a thin film transistor (TFT) array panel that includes an insulating substrate; a gate line formed on the insulating substrate and having a first layer of an Al containing metal, a second layer of a Cu containing metal that is thicker than the first layer, and a gate electrode; a gate insulating layer arranged on the gate line; a semiconductor arranged on the gate insulating layer; a data line having a source electrode and arranged on the gate insulating layer and the semiconductor; a drain electrode arranged on the gate insulating layer and the semiconductor and facing the source electrode; a passivation layer having a contact hole and arranged on the data line and the drain electrode; and a pixel electrode arranged on the passivation layer and coupled with the drain electrode through the contact hole.
1. A method for manufacturing a thin film transistor array (TFT) panel, comprising:
forming a gate line on an insulating substrate, the gate line having a first layer including Al, a second layer including Cu and is thicker than the first layer, and a gate electrode;
sequentially depositing a gate insulating layer, a semiconductor layer, and an ohmic contact layer on the gate line;
patterning the semiconductor layer and the ohmic contact layer;
forming a drain electrode and a data line having a source electrode on the gate insulating layer and the ohmic contact layer, the drain electrode facing the source electrode with a gap formed therebetween;
forming a passivation layer having a contact hole that exposes the drain electrode, the passivation layer being formed on the data line and the drain electrode; and
forming a pixel electrode on the passivation layer, the pixel electrode being coupled with the drain electrode through the contact hole,
wherein the second layer is formed to be more than four times thicker than the first layer.
2. The method of claim 1 , wherein forming the gate line on the insulating substrate comprises:
sequentially depositing the first layer and the second layer on the insulating substrate; and
simultaneously patterning the first layer and the second layer via an etching process.
3. The method of claim 2 , wherein the first layer and the second layer are etched by an etchant including H 2 0 2 .
4. The method of claim 3 , wherein the etchant further contains at least one of phosphoric acid (H 3 PO 4 ), nitric acid (HNO 3 ), and acetic acid (CH 3 COOH).
5. The method of claim 2 , wherein the first layer and the second layer are etched using an etchant containing phosphoric acid (H 3 PO 4 ), nitric acid (HNO 3 ), and acetic acid (CH 3 COOH).
6. The method of claim 5 , wherein the etchant includes about 50% to about 80% of phosphoric acid, about 2% to about 10% of nitric acid, and about 2% to about 15% of acetic acid.
7. The method of claim 1 , wherein forming the gate line on the insulating substrate comprises:
sequentially depositing the first layer and the second layer on a insulating substrate in sequence; and
sequentially patterning the first layer and the second layer using a wet etching and a dry etching process.
8. The method of claim 1 , wherein the data line and the semiconductor layer are formed by a photo-etching process using a photoresist pattern having a first portion, a second portion that is thicker than the first portion, and a third portion that is thinner than the first portion.
9. The method of claim 8 , wherein the first portion is arranged between the source electrode and the drain electrode, and the second portion is arranged on the data line and the drain electrode.
10. The method of claim 1 , further comprising:
forming a color filter on the insulating substrate before forming the passivation layer.