Piezoceramic multilayer actuator manufactured according to particular sintering parameters and corresponding method of manufacturing
View Patent ↗A piezoceramic multilayer actuator ( 10 ) has a plurality of piezoceramic layers ( 12 ), a security layer ( 20 ) and a plurality of inner electrodes ( 16, 18 ). The piezoceramic layers ( 12 ) has a piezoceramic first material sintered at a sintering temperature. The security layer ( 20 ) has a second material and is disposed between two piezoceramic layers ( 12 ). Each of the plurality of inner electrodes ( 16, 18 ) has a third material and is deposited between two piezoceramic layers ( 12 ). The degree of sintering of the second material is lower than the degree of sintering of the third material.
1. A piezoceramic multilayer actuator comprising:
a plurality of piezoceramic layers comprising a piezoceramic first material sintered at a sintering temperature;
a security layer comprising a second material and disposed between two piezoceramic layers; and
a plurality of inner electrodes comprising a third material, each of the inner electrodes being deposited between two piezoceramic layers,
wherein the degree of sintering of the second material is lower than the degree of sintering of the third material such that at least one of:
(a) the degree of sintering within the second material is lower than the degree of sintering within the third material, and
(b) the degree of sintering at the surfaces between the second material and the first material is lower than the degree of sintering at the surfaces between the third material and the first material.
2. The piezoceramic multilayer actuator according to claim 1 , wherein the melting point of the second material is higher than the melting point of the third material.
3. The piezoceramic multilayer actuator according to claim 1 , wherein the second material is essentially Pd or Pt.
4. The piezoceramic multilayer actuator according to claim 1 , wherein the average ratio between the surface area and the volume of the grains of the second material is lower than the average ratio between the surface area and the volume of the grains of the third material.
5. The piezoceramic multilayer actuator according to claim 1 , wherein the average size of the grains of the second material is larger than the average size of the grains of the third material.
6. The piezoceramic multilayer actuator according to claim 1 , wherein the average shape of the grains of the second material is different from the average shape of the grains of the third material.
7. The piezoceramic multilayer actuator according to claim 1 , wherein the surfaces of the grains of the second material are leached.
8. The piezoceramic multilayer actuator according to claim 1 , wherein the grains of the second material provide a coating reducing the sintering activity.
9. A piezoceramic stack comprising:
a plurality of sub-stacks comprising a plurality of piezoceramic layers of a piezoceramic first material sintered at a sintering temperature;
a security layer comprising a second material and disposed between two adjacent sub-stacks; and
a plurality of inner electrodes comprising a third material, each of the inner electrodes being deposited between two piezoceramic layers,
wherein the degree of sintering of the second material is lower than the degree of sintering of the third material such that at least one of:
(a) the degree of sintering within the second material is lower than the degree of sintering within the third material, and
(b) the degree of sintering at the surfaces between the second material and the first material is lower than the degree of sintering at the surfaces between the third material and the first material.
10. The piezoceramic stack according to claim 9 , wherein the melting point of the second material is higher than the melting point of the third material.
11. The piezoceramic stack according to claim 9 , wherein the second material is essentially Pd or Pt.
12. The piezoceramic stack according to claim 9 , wherein the average ratio between the surface area and the volume of the grains of the second material is lower than the average ratio between the surface area and the volume of the grains of the third material.
13. The piezoceramic stack according to claim 9 , wherein the average size of the grains of the second material is larger than the average size of the grains of the third material.
14. The piezoceramic stack according to claim 9 , wherein the average shape of the grains of the second material is different from the average shape of the grains of the third material.
15. The piezoceramic stack according to claim 9 , wherein the surfaces of the grains of the second material are leached.
16. The piezoceramic stack according to claim 9 , wherein the grains of the second material provide a coating reducing the sintering activity.