Piezoceramic multilayer actuator and method of manufacturing a piezoceramic multilayer actuator
View Patent ↗A piezoceramic multilayer actuator ( 10 ) has a plurality of piezoceramic layers ( 12 ) and a security layer ( 20 ) disposed between two piezoceramic layers ( 12 ). The piezoceramic layers ( 12 ) have a piezoceramic first material sintered at a sintering temperature. The security layer ( 20 ) has a second material ( 32 ) and particles ( 30 ) at least partially embedded in the second material ( 32 ). The particles ( 30 ) have a third material different from the first material and different from the second material ( 32 ). An adhesion between the third material and the first material is weaker than an adhesion between the second material ( 32 ) and the first material.
1. A piezoceramic multilayer actuator comprising: at least two piezoceramic layers comprising a piezoceramic first material sintered at a sintering temperature and having interfacing surfaces along the sides on which the at least two piezoceramic layers are stacked; and a security layer disposed between and extending across substantially the entire interfacing surfaces of the at least two piezoceramic layers; wherein the security layer comprises a matrix of a second material and particles at least partially embedded in the matrix of the second material, wherein the particles comprise a third material different from the first material and different from the second material, and wherein an adhesion between the particles in the security layer and an adjacent piezoceramic layer is weaker than an adhesion between the matrix of the security layer and the adjacent piezoceramic layer, such that a weakened connection between the security layer and the adjacent piezoceramic layer is created.
2. The piezoceramic multilayer actuator according to claim 1 , wherein the third material is an inorganic material.
3. The piezoceramic multilayer actuator according to claim 1 , further comprising gaps at interfaces between the particles and at least one of the plurality of piezoceramic layers.
4. The piezoceramic multilayer actuator according to claim 1 , wherein at the sintering temperature of the first material, the third material essentially does not chemically react with the first material and also essentially does not chemically react with the second material.
5. The piezoceramic multilayer actuator according to claim 1 , wherein, at the sintering temperature of the first material, an original material comprised in the particles is converted to the third material.
6. The piezoceramic multilayer actuator according to claim 5 , wherein, at the sintering temperature of the first material, an original material comprised in the particles chemically reacts with parts of the first material or with the second material thereby being converted to the third material.
7. The piezoceramic multilayer actuator according to claim 1 , wherein a diameter of each of the particles essentially equals or is slightly larger than a thickness of the security layer.
8. The piezoceramic multilayer actuator according to claim 1 , wherein the total volume of the particles is at least 5 of the total volume of the security layer.
9. The piezoceramic multilayer actuator according to claim 1 , wherein the thermal expansion coefficient of the third material is different from the thermal expansion coefficient of the second material.
10. The piezoceramic multilayer actuator according to claim 1 , wherein the interfacial energy between the third material and the second material is different from the interfacial energy between the third material and the first material.
11. The piezoceramic multilayer actuator according to claim 1 , wherein the total volume of the particles is at least 10% of the total volume of the security layer.
12. The piezoceramic multilayer actuator according to claim 1 , wherein the total volume of the particles is at least 20% of the total volume of the security layer.
13. The piezoceramic multilayer actuator according to claim 1 , wherein the total volume of the particles is at least 40% of the total volume of the security layer.