Component comprising submicron hollow spaces
View Patent ↗Methods for filtering particles from a fluid are disclosed, wherein an array of microstructures defining respective microchannels having respective minimum widths are used to separate the fluid from particles to be filtered. The fluid flows through the minimum widths into the microchannels defined between adjacent microstructures. The particles to be filtered are prevented from passing through the respective minimum widths, resulting in filtration of those particles from the fluid. The microchannels can be provided with gradient characteristics to separate particles in the fluid according to size.
1. An optical component comprising an array of microstructures provided on a substrate, said microstructures having respective top surfaces and side walls such that adjacent microstructures define microchannels between respective side walls thereof, and a cover material deposited over said microstructures, said cover material covering the top surfaces of two adjacent ones of said microstructures to a first thickness of said cover material and at least partially covering the adjacent side walls of those two microstructures to a second thickness of said cover material, said first thickness being greater than said second thickness, wherein the portions of said covering material covering the top surfaces of said two microstructures extend toward one another over the microchannel defined between said two microstructures.
2. An optical component according to claim 1 , the portions of said covering material covering the top surfaces of said two microstructures extending toward one another over said microchannel to a sufficient extent to thereby nearly or completely close said microchannel from the environment of the component.