Ultraviolet detecting device and manufacturing method thereof, and ultraviolet quantity measuring apparatus
View Patent ↗The present invention provides an ultraviolet detecting device which comprises a silicon semiconductor layer having a thickness ranging from greater than or equal to 3 nm to less than or equal to 36 nm, which is formed over an insulating layer, lateral PN-junction type first and second photodiodes formed in the silicon semiconductor layer, an interlayer insulating film formed over the silicon semiconductor layer, a first filter layer made of silicon nitride, which is formed over the interlayer insulating film provided over the first photodiode and causes light lying in a wavelength range of an UV-B wave or higher to pass therethrough, and a second filter layer made of silicon nitride, which is formed over the interlayer insulating film provided over the second photodiode and allows light lying in a wavelength range of an UV-A wave or higher to pass therethrough.
1. An ultraviolet detecting device comprising:
a silicon semiconductor layer having a thickness ranging from greater than or equal to 3 nm to less than or equal to 36 nm, said silicon semiconductor layer being formed over an insulating layer;
lateral PN-junction type first and second photodiodes formed in the silicon semiconductor layer;
an interlayer insulating film formed over the silicon semiconductor layer;
a first filter layer made of silicon nitride, said first filter layer being formed over the interlayer insulating film provided over the first photodiode and allowing light lying in a wavelength range of an UV-B wave or higher to pass therethrough; and
a second filter layer made of silicon nitride, said second filter layer being formed over the interlayer insulating film provided over the second photodiode and allowing light lying in a wavelength range of an UV-A wave or higher to pass therethrough.
2. The ultraviolet detecting device according to claim 1 , wherein the first filter layer and the second filter layer respectively have the same thickness in a range from greater than or equal to 300 nm to less than or equal to 100 nm.
3. The ultraviolet detecting device according to claim 1 , wherein the first filter layer is smaller than the second filter layer in hydrogen content.
4. The ultraviolet detecting device according to claim 1 , wherein the first filter layer is a silicon nitride film formed by a CVD method in which a flow rate of monosilane, ammonia, nitrogen and Argon is set to 0.3:7:3:1 under conditions of temperatures from greater than or equal to 350° C. to less than or equal to 450° C. and pressures from great than or equal to 4.0 Torr to less than or equal to 6.0 Torr, and
wherein the second filter layer is a silicon nitride film formed by a CVD method in which the flow rate of monosilane, ammonia, nitrogen and Argon is set to 1.0:7:3:1 under conditions of temperatures from greater than or equal to 350° C. to less than or equal to 450° C. and pressures from great than or equal to 4.0 Torr to less than or equal to 6.0 Torr.