Semiconductor pressure sensor, manufacturing method thereof, and die for molding semiconductor pressure sensor
View Patent ↗A semiconductor pressure sensor is provided with a semiconductor pressure sensor part that converts a pressure to an electrical signal, a sensor module in which said semiconductor pressure sensor part and a terminal of which part is extended to the outside are insert-molded with a first resin, and an outer case in which said sensor module is contained, and said sensor module is further insert-molded with a second resin to form a connector portion, and the semiconductor pressure sensor is characterized in that the exposed portion of the sensor module from the second resin, and the boundary between the exposed portion of the sensor module and the second resin are covered with an adhesive.
1. A semiconductor pressure sensor comprising:
a semiconductor pressure sensor part that converts a pressure to an electrical signal,
a sensor module for mounting said semiconductor pressure sensor part and in which a terminal of which part is extended to the outside is insert-molded with a first resin; and
an outer case in which said sensor module is further insert-molded with a second resin to form a connector portion for external connection;
wherein a back face of said sensor module is covered with said second resin; and
wherein a gate for molding the second resin is provided on a backside of a plane, said plane extending through the boundary between the second resin and an exposed portion of the sensor module, said exposed portion including a portion which contains the semiconductor pressure sensor part.
2. The semiconductor pressure sensor according to claim 1 , wherein a groove formed at the boundary portion between said sensor module and outer case and is covered with an adhesive.
3. The semiconductor pressure sensor according to claim 1 or 2 , wherein said first resin is a thermosetting resin, and said second resin is a thermoplastic resin.
4. The semiconductor pressure sensor according to claim 1 , wherein the outer case is molded to cover the back face of said sensor module.
5. The semiconductor pressure sensor according to claim 1 , wherein the gate is provided for use in molding the outer case with the second resin.
6. A die for molding a semiconductor pressure sensor, said pressure sensor comprising:
a sensor module in which a semiconductor pressure sensor part that converts a pressure to an electrical signal and a terminal of which part is extended to the outside are insert-molded with a first resin; and
an outer case in which said sensor module is further insert-molded with a second resin to form a connector portion for external connection;
wherein a back face of said sensor module is covered with said second resin; and said die comprising;
a gate for molding the second resin;
wherein said gate is provided on a backside of a plane, said plane extending through the boundary between the second resin and an exposed portion of the sensor module, said exposed portion including a portion which contains the semiconductor pressure sensor part.
7. A manufacturing method of a semiconductor pressure sensor comprising:
forming a sensor module with a first resin by insert-molding a semiconductor pressure sensor part that converts a pressure to an electrical signal and a terminal having a part which extends to the outside; and
forming an outer case having a connector portion with a second resin by further insert-molding so as to cover a back face of said sensor module,
wherein a gate for molding the second resin is provided on a backside of a plane, said plane extending through the boundary between the second resin and an exposed portion of the sensor module, said exposed portion including a portion which contains the semiconductor pressure sensor part.