Methods for exposure for the purpose of thermal management for imprint lithography processes
View Patent ↗The present invention is directed to a method that attenuates, if not avoids, heating of a substrate undergoing imprint lithography process and the deleterious effects associated therewith. To that end, the present invention includes a method of patterning a field of a substrate with a polymeric material that solidifies in response to actinic energy in which a sub-portion of the field is exposed sufficient to cure the polymeric material is said sub-portion followed by a blanket exposure of all of the polymeric material associated with the entire field to cure/solidify the same.
1. A method of patterning a field located on a surface of a substrate with a polymeric material that solidifies in response to actinic radiation using a template having a mold with a patterning surface thereon, the field having dimensions and the patterning surface having dimensions corresponding to the field dimensions, the method comprising:
depositing the polymeric material on the field;
contacting the patterning surface of the mold with deposited polymeric material;
exposing a sub-portion of said field to said actinic radiation to solidify the polymeric material in the sub-portion of said field while maintaining the patterning surface in contact with the polymeric material;
exposing all of said field including said sub-portion, to said actinic radiation, to solidify the remaining polymeric material in the field while maintaining the patterning surface in contact with the polymeric material; and
separating the template from the solidified polymeric material on the field.
2. The method as recited in claim 1 wherein said substrate is a semiconductor wafer and said field is coextensive with an entire area of one side of said substrate.
3. The method as recited in claim 1 wherein said substrate is a semiconductor wafer and said field is a sub-part of an entire area of one side of said substrate.
4. The method as recited in claim 1 wherein said sub-portion has dimensions and wherein said exposing said sub-portion further includes propagating a flux of said actinic radiation along a path, with said flux having a cross-section that is greater in dimensions than said sub-portion dimensions and further including placing a spatial filter in said path to reduce said flux to dimensions commensurate with said sub-portion dimensions.
5. The method as recited in claim 1 wherein said sub-portion has dimensions and wherein said exposing said sub-portion further includes propagating a flux of said actinic radiation along a path, with said flux having a cross-section that is greater in dimensions than said sub-portion dimensions and further including placing a spatial filter in said path to reduce said flux, to dimensions commensurate with said sub-portion dimensions, and wherein said exposing all of said field further indicates removing said spatial filter from said path.
6. The method of claim 1 further including transferring thermal energy, accumulating in said substrate, away from said substrate by placing said substrate in thermal communication with a support.