Method for manufacturing organic thin film transistor substrate
View Patent ↗A method for manufacturing an organic thin film transistor substrate comprising forming a gate electrode on a substrate, forming a gate insulating layer on the gate electrode, defining a channel region on the gate insulating layer between a source electrode and a drain electrode, neutralizing the channel region, forming a bank insulating layer on the source electrode and the drain electrode, and forming an organic semiconductor layer in a region prepared by the bank insulating layer.
1. A method for manufacturing an organic thin film transistor substrate comprising:
forming a gate electrode on a substrate;
forming a gate insulating layer on the gate electrode;
defining a channel region on the gate insulating layer between a source electrode and a drain electrode;
alkali treating the channel region to neutralize the channel region;
forming a bank insulating layer on the source electrode and the drain electrode; and
forming an organic semiconductor layer in a region prepared by the bank insulating layer.
2. The method of claim 1 wherein the alkali treating the channel region comprises spraying alkali solution on the substrate on which the source electrode and the drain electrode are formed.
3. The method of claim 1 wherein the alkali treating the channel region comprises dipping the substrate, on which the source electrode and the drain electrode are formed, in an alkali solution.
4. The method of claims 3 , wherein the alkali solution comprises tetramethylammonium hydroxide (TMAH).
5. The method of claim 4 , wherein concentration of the tetramethylammonium hydroxide (TMAH) solution is about 2 to 3%.
6. The method of claim 1 , wherein the alkali treating the channel region further comprises cleaning the substrate, on which the source electrode and the drain electrode are formed, using deionized water (DI).
7. The method of claim 6 , wherein the alkali treating the channel region further comprises drying the cleaned substrate.
8. A method for manufacturing an organic thin film transistor substrate comprising:
forming a gate electrode on a substrate;
forming an insulating layer on the gate electrode;
defining a channel region on the insulating layer between a source electrode and a drain electrode;
alkali treating the channel region to neutralize the channel region; and
forming an organic semiconductor in the channel region.
9. The method of claim 8 , wherein the alkali treating the channel region comprises spraying an alkali solution on the substrate on which the source electrode and the drain electrode are formed.
10. The method of claim 8 , wherein the alkali treating the channel region comprises dipping the substrate, on which the source electrode and the drain electrode are formed, in an alkali solution.
11. The method of claims 10 , wherein the alkali solution comprises tetramethylammonium hydroxide (TMAH).
12. The method of claim 11 , wherein concentration of the tetramethylammonium hydroxide (TMAH) solution is about 2 to 3%.
13. The method of claim 8 , wherein the alkali treating the channel region further comprises cleaning the substrate, on which the source electrode and the drain electrode are formed, using deionized water (DI).
14. The method of claim 13 , wherein the alkali treating the channel region further comprises drying the cleaned substrate.