Organic light-emitting device including transparent conducting oxide layer as cathode and method of manufacturing the same
View Patent ↗An organic light-emitting device including a transparent conducting oxide layer as a cathode and a method of manufacturing the organic light-emitting device. The organic light-emitting device includes an anode disposed on a substrate. An organic functional layer including at least an organic light-emitting layer is disposed on the anode. The transparent conducting oxide layer used as the cathode is disposed on the organic functional layer. The transparent conducting oxide layer cathode is formed by plasma-assisted thermal evaporation. A microcavity structure is not formed in the organic light-emitting device, thereby avoiding a luminance change and a color shift as a function of viewing angle.
1. A method of manufacturing an organic light-emitting device, the method comprising:
forming an anode on a substrate;
forming an organic functional layer on and in electrical contact with the anode, the formed organic functional layer comprising at least an organic light-emitting layer and a hole transport layer and/or an electron transport layer on the organic light-emitting layer; and
forming a cathode as a transparent conducting oxide layer on and in electrical contact with the organic functional layer, wherein the transparent conducting oxide layer is formed using plasma-assisted thermal evaporation.
2. The method of claim 1 , wherein the transparent conducting oxide layer is an indium oxide layer, an indium tin oxide layer, a tin oxide layer, an indium zinc oxide layer, an aluminum zinc oxide layer, an aluminum tin oxide layer, or an aluminum indium oxide layer.
3. The method of claim 1 , further comprising forming an electron injection enhancing layer on and in electrical contact with the organic functional layer before forming the cathode on and in electrical contact with the electron injection enhancing layer.
4. The method of claim 3 , wherein the electron injection enhancing layer is a metal layer having a thickness less than a skin depth.
5. The method of claim 4 , wherein the electron injection enhancing layer comprises Mg, Ca, or In.
6. The method of claim 1 , wherein the anode comprises gold (Au) or platinum (Pt).
7. The method of claim 1 , wherein the anode is made of a transparent conducting oxide material doped with an insulating oxide material.
8. The method of claim 7 , wherein:
the transparent conducting oxide material is indium oxide, indium tin oxide, tin oxide, indium zinc oxide, aluminum zinc oxide, aluminum tin oxide, or aluminum indium oxide, and
the insulating oxide material is lanthanum oxide, yttrium oxide, beryllium oxide, titanium oxide, silicon oxide, gallium oxide, palladium oxide, or samarium oxide.