Surface-plasmon detector based on a field-effect transistor
View Patent ↗According to one embodiment, a surface-plasmon (SP) beam generated by an SP source and directed via an SP waveguide is applied to a gate node of a field-effect transistor (FET). The FET also has a source node and a drain node. In a representative configuration, the gate, source, and drain nodes are electrically biased to pass an electrical current between the source and drain nodes in a manner that makes the electrical current responsive to the intensity of the SP beam.
1. A device, comprising:
a field-effect transistor (FET) comprising a control node, a first channel node, and a second channel node; and
a waveguide adapted to apply a beam of surface plasmons to the control node, the control node being such that an electrical current propagating between said first and second channel nodes is responsive to an applied intensity of said beam.
2. The invention of claim 1 , wherein said electrical current is responsive to an electric potential applied to the control node.
3. The invention of claim 1 , further comprising a source of surface plasmons, wherein said beam is received via the waveguide from said source.
4. The invention of claim 3 , wherein the waveguide is adapted to change one or more of a propagation direction, a cross-section, and an intensity distribution for said beam while guiding the beam toward the control node.
5. The invention of claim 1 , wherein the waveguide comprises:
an electrically conducting layer; and
a dielectric layer adjacent to the electrically conducting layer, wherein an interface between the electrically conducting layer and the dielectric layer defines a conduit for propagation of the beam.
6. The invention of claim 5 , wherein the electrically conducting layer is laterally patterned to define lateral dimensions of the waveguide.
7. The invention of claim 5 , wherein the electrically conducting layer comprises a tapered portion adapted to change a cross-section of said beam.
8. The invention of claim 5 , wherein the waveguide comprises the control node and a structure that is external to the FET.
9. The invention of claim 1 , wherein the FET comprises:
a substrate comprising semiconductor of a first type;
a dielectric layer adjacent to a surface of the substrate, wherein the control node is locally physically connected to the dielectric layer; and
first and second regions within the substrate, each of said regions comprising semiconductor of a second type, wherein:
the first channel node is in direct electrical contact with the first region;
the second channel node is in direct electrical contact with the second region; and
the substrate is adapted to conduct said electrical current between the first and second regions.
10. The invention of claim 9 , wherein:
the semiconductor of the first type is a p-doped silicon;
the semiconductor of the second type is an n-doped silicon;
the dielectric layer comprises a silicon oxide or a silicon nitride; and
each of the control, first channel, and second channel nodes comprises metal.
11. The invention of claim 1 , wherein the FET comprises:
a structural support layer, wherein the control node comprises a metal stripe locally physically connected to the structural support layer;
a dielectric layer adjacent to the structural support layer and the metal stripe;
a first semiconductor block comprising semiconductor of a first type; and
second and third semiconductor blocks, each of said second and third blocks comprising semiconductor of a second type, wherein:
the first, second, and third semiconductor blocks are locally physically connected to the dielectric layer;
the first channel node is in direct electrical contact with the second semiconductor block;
the second channel node is in direct electrical contact with the third semiconductor block; and
the first semiconductor block is adapted to conduct said electrical current between the second and third semiconductor blocks.
12. The invention of claim 1 , wherein:
the FET comprises a semiconductor substrate characterized by a band gap; and
the substrate is adapted to generate mobile charge carriers in response to the beam via charge-carrier excitations across the band gap.
13. A method of operating a field-effect transistor (FET) comprising a control node, a first channel node, and a second channel node, the method comprising:
applying a voltage between the first and second channel nodes; and
applying a beam of surface plasmons to the control node such that an electrical current propagating between the first and second channel nodes responds to an applied intensity of said beam.
14. The invention of claim 13 , further comprising receiving said beam at the control node via a planar waveguide.
15. The invention of claim 14 , further comprising changing one or more of a propagation direction, a cross-section, and an intensity distribution for said beam while guiding said beam along said waveguide toward the control node.
16. The invention of claim 13 , further comprising changing the intensity of said beam to change said electrical current.
17. The invention of claim 13 , wherein:
the FET comprises:
a substrate comprising a semiconductor of a first type;
a dielectric layer adjacent to the substrate, wherein the control node is located in or next to the dielectric layer; and
first and second regions within the substrate, each comprising a semiconductor of a second type, wherein:
the first channel node is in direct electrical contact with the first region;
the second channel node is in direct electrical contact with the second region; and
the substrate is adapted to conduct the electrical current between the first and second regions; and
the method further comprises:
applying a reference electric potential to the first channel node;
electrically biasing the control node with respect to the reference potential to create an inversion channel in the substrate between the first and second regions; and
electrically biasing the second channel node with respect to the reference potential to drive said electrical current through the inversion channel.
18. The invention of claim 13 , wherein:
the FET comprises:
a structural support layer, wherein the control node comprises a metal stripe locally physically connected to the structural support layer;
a dielectric layer adjacent to the structural support layer and the metal stripe;
a first semiconductor block comprising a semiconductor of a first type; and
second and third semiconductor blocks, each comprising a semiconductor of a second type, wherein:
the first, second, and third semiconductor blocks are locally physically connected to the dielectric layer;
the first channel node is in direct electrical contact with the second semiconductor block;
the second channel node is in direct electrical contact with the third semiconductor block; and
the first semiconductor block is adapted to conduct the electrical current between the second and third semiconductor blocks; and
the method further comprises:
applying a reference electric potential to the first channel node;
electrically biasing the control node with respect to the reference potential to create an inversion channel in the first semiconductor block between the second and third semiconductor blocks; and
electrically biasing the second channel node with respect to the reference potential to drive said electrical current through the inversion channel.
19. The invention of claim 13 , wherein:
the FET comprises a semiconductor substrate characterized by a band gap; and
the application of said beam causes charge-carrier excitations across the band gap in the semiconductor substrate.
20. A method of detecting surface plasmons, comprising:
receiving a beam of surface plasmons at a control node of a field-effect transistor (FET), said FET comprising the control node, a first channel node, and a second channel node;
measuring an electrical current propagating between the first and second channel nodes; and
estimating an intensity of said beam based on the measured electrical current.