IP Library Granted Patent US 8,105,870
Granted Patent B2
US 8,105,870 · App. 12/056,366 · Granted Jan 31, 2012

Method for manufacturing semiconductor device, semiconductor device, semiconductor circuit, electro-optical device, and electronic apparatus

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Quick Facts
Patent No.
US 8,105,870
App. No.
12/056,366
Granted
Jan 31, 2012
Kind
B2
Abstract

A method for manufacturing a semiconductor device includes: forming a source electrode and a drain electrode on a substrate; forming an organic semiconductor layer including a π conjugated organic compound at least between the source electrode and the drain electrode; applying an application liquid on the organic semiconductor layer, the application liquid being made of a polymer of an alicyclic compound dissolved in a paraffin hydrocarbon solvent that is a carbocyclic compound without having aromaticity; forming a gate insulation layer including the polymer of the alicyclic compound by removing the paraffin hydrocarbon solvent from the application liquid; and forming a gate electrode on the gate insulation layer.

Claims (12)

1. A method for manufacturing a semiconductor device, comprising:

forming a source electrode and a drain electrode on a substrate;

forming an organic semiconductor layer including a π conjugated organic compound at least between the source electrode and the drain electrode;

applying an application liquid on the organic semiconductor layer, the application liquid being made of a polymer of an alicyclic compound dissolved in a paraffin hydrocarbon solvent that is a carbocyclic compound without having aromaticity;

forming a gate insulation layer including the polymer of the alicyclic compound by removing the paraffin hydrocarbon solvent from the application liquid; and

forming a gate electrode on the gate insulation layer,

wherein the alicyclic compound is one compound selected from the group consisting of:

wherein R 1 and R 2 , respectively, indicate a hydrogen atom and an alkyl group having a carbon number of from 1 to 20, and m+n is in the range 10 to 100,000, and m can be zero.

2. The method for manufacturing a semiconductor device according to claim 1 , wherein the paraffin hydrocarbon solvent is in a liquid state at a normal temperature and a normal pressure condition.

3. The method for manufacturing a semiconductor device according to claim 1 , wherein the paraffin hydrocarbon solvent is removed from the application liquid so as to remain at 0.1 wt % or less with respect to the polymer of the alicyclic compound.

4. The method for manufacturing a semiconductor device according to claim 1 , wherein the gate electrode is made of silver.

5. The method for manufacturing a semiconductor device according to claim 1 , wherein the paraffin hydrocarbon solvent is made of at least one of heptane, octane, nonane, decane, undecane, dodecane, tridecane, tetradecane, pentadecane, hexadecane, and heptadecane.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 13, 2018
From: SEIKO EPSON CORPORATION
To: E INK CORPORATION
Reel/Frame 047072/0325 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 27, 2008
From: MASUDA, TAKASHI
To: SEIKO EPSON CORPORATION
Reel/Frame 020709/0825 →