Granted Patent B1

US 8,166,632 · App. 12/057,611 · Granted May 1, 2012

Abstract

Claims (47)

1. A method for providing a perpendicular magnetic recording (PMR) transducer including an intermediate layer, the method comprising:

providing a hard mask layer on the intermediate layer, the hard mask layer for a reactive ion etch of the intermediate layer, the intermediate layer being a nonmagnetic insulating layer;

providing a bottom antireflective coating (BARC) layer on the hard mask layer, the BARC layer further being a masking layer for the hard mask layer;

forming a trench in the intermediate layer using at least one reactive ion etch (RIE), the trench having a bottom and a top wider than the bottom; and

providing a PMR pole, at least a portion of the PMR pole residing in the trench.

2. The method of claim 1 wherein the BARC layer has a RIE selectivity of at least six for the hard mask layer.

3. The method of claim 2 wherein the RIE selectivity is at least eight.

4. The method of claim 1 wherein the hard mask layer has a RIE selectivity of at least seven for the intermediate layer.

5. The method of claim 4 wherein the RIE selectivity is at least ten.

6. The method of claim 1 wherein the BARC layer includes SiN.

7. The method of claim 1 wherein the hard mask layer includes at least one of Ru, Cr, and NiCr.

8. The method of claim 1 further comprising:

providing a nonmagnetic layer in the trench, at least a portion of the nonmagnetic layer residing in the trench, the PMR pole residing on the nonmagnetic layer.

9. The method of claim 1 further comprising:

providing a RIE stop layer under the intermediate layer, the RIE stop layer corresponding to at least a portion of the at least one RIE forming the trench in the intermediate layer.

10. The method of claim 1 wherein the BARC layer is the masking layer for a RIE of the hard mask layer.

11. A method for providing a perpendicular magnetic recording (PMR) transducer including an intermediate layer, the method comprising:

providing a hard mask layer on the intermediate layer, the hard mask layer for a reactive ion etch of the intermediate layer;

providing a bottom antireflective coating (BARC) layer on the hard mask layer, the BARC layer further being a masking layer for the hard mask layer;

forming a trench in the intermediate layer using at least one reactive ion etch (RIE), the trench having a bottom and a top wider than the bottom; and

providing a PMR pole, at least a portion of the PMR pole residing in the trench, wherein the step of forming the trench further includes:

providing a resist mask on the BARC layer, the resist mask having an aperture therein;

performing a first RIE having a first chemistry on the BARC layer to form a first aperture substantially aligned with the aperture in the resist mask; and

performing a second RIE having a second chemistry on the hard mask layer to form a second aperture substantially aligned with the first aperture.

12. The method of claim 11 wherein the first chemistry is different from the second chemistry.

13. The method of claim 12 wherein the second chemistry includes Cl.

14. The method of claim 11 wherein the resist mask has a thickness of not more than 0.3 microns.

15. The method of claim 14 wherein the resist mask has a thickness of not less than 0.1 microns.

16. A method for providing a perpendicular magnetic recording (PMR) transducer including an intermediate layer, the method comprising:

providing a hard mask layer on the intermediate layer, the hard mask layer for a reactive ion etch of the intermediate layer;

providing a bottom antireflective coating (BARC) layer on the hard mask layer, the BARC layer further being a masking layer for the hard mask layer;

forming a trench in the intermediate layer using at least one reactive ion etch (RIE), the trench having a bottom and a top wider than the bottom; and

providing a PMR pole, at least a portion of the PMR pole residing in the trench, wherein the providing the PMR pole further includes:

providing a planarization stop layer;

plating a PMR pole layer on the planarization stop layer; and

performing a planarization.

17. A method for providing a perpendicular magnetic recording (PMR) transducer comprising:

providing a reactive ion etch (RIE) stop layer;

providing an intermediate layer on the RIE stop layer, the RIE stop layer being insensitive to an intermediate layer RIE configured to etch the intermediate layer;

providing a hard mask layer on the intermediate layer, the hard mask layer for a RIE of the intermediate layer, the hard mask layer having a selectivity of at least seven for the intermediate layer;

providing a bottom antireflective coating (BARC) layer on the hard mask layer, the BARC layer further being a masking layer for the hard mask layer, the BARC layer having a selectivity of at least six for the hard mask layer;

providing a resist mask on the BARC layer, the resist mask having an aperture therein and a thickness of not more than 0.3 micron;

performing a first RIE having a first chemistry on the BARC layer to form a first aperture substantially aligned with the aperture in the resist mask;

performing a second RIE having a second chemistry on the hard mask layer to form a second aperture substantially aligned with the first aperture, the second chemistry being different from the first chemistry;

performing the intermediate layer RIE to form a trench in the intermediate layer, the trench having a bottom and a top wider than the bottom;

providing a nonmagnetic layer in the trench, at least a portion of the nonmagnetic layer residing in the trench; and

providing a PMR pole, at least a portion of the PMR pole residing in the trench, the PMR pole residing on the nonmagnetic layer.

Assignments (9)