Electronic device and method of manufacturing the same
View Patent ↗An electronic device includes a conductive pattern formed on a first insulating film, a second insulating film formed on the conductive pattern and the first insulating film, a hole formed in the second insulating film on the conductive pattern, carbon nanotubes formed in the hole to extend from a surface of the conductive pattern, and a buried film buried in clearances among the carbon nanotubes in the hole.
1. A method of manufacturing an electronic device, comprising:
forming a conductive pattern over a first insulating film, the first insulating film being formed over a substrate;
forming a second insulating film to cover the first insulating film and the conductive pattern;
forming a hole in the second insulating film over the conductive pattern;
forming a supporting film for supporting a catalyst over a bottom surface of the hole and an upper surface of the second insulating film;
forming a catalyst element on an upper surface of the supporting film, the catalyst element being made of at least one of catalyst particles and a catalyst film;
growing carbon element cylindrical structures on the catalyst element;
forming a buried insulating film in a clearance among the carbon element cylindrical structures and over the second insulating film, and in the hole; and
polishing the carbon element cylindrical structures, the buried insulating film, and the supporting film to remove the carbon element cylindrical structures, the buried insulating film, and the supporting film over an upper surface of the second insulating film and to leave the buried insulating film and the carbon element cylindrical structures in the hole as a via.
2. The method of claim 1 , wherein the supporting film is formed of any one of tantalum, tantalum nitride, titanium, and titanium nitride, and their combination.
3. The method of claim 1 , wherein the supporting film is formed by a sputter method to grow selectively in a direction perpendicular on the substrate.
4. The method of claim 1 , wherein the catalyst particles or the catalyst film is formed of any one of a first metal made of one of cobalt, iron, and nickel, a binary metal containing the first metal, and an alloy of the first metal.
5. The method of claim 1 , wherein the buried insulating film is formed by coating a coating insulating material and then curing the coating insulating material by an annealing.
6. The method of claim 5 , wherein before coating the coating insulating material in the clearance among the carbon element cylindrical structures and in the hole, applying any one of oxygen plasma, ozone, and ultraviolet ray to a coating area of the coating insulating material.
7. The method of claim 5 , wherein a polishing condition for leaving the buried insulating film and the carbon element cylindrical structures in the hole is changed to set a polishing rate of the supporting film larger than a polishing rate of the buried insulating film and the second insulating film, when the supporting film is exposed by polishing the buried insulating film and the carbon element cylindrical structures.
8. The method of claim 5 , wherein after polishing the buried insulating film and the carbon element cylindrical structures, increasing an exposed portion of the carbon element cylindrical structures by etching an exposed surface of the buried insulating film in the hole.
9. The method of claim 1 , further comprising the step of:
forming an upper conductive pattern, which is connected to an upper end of the via in the hole, over the second insulating film.