Method for providing at least one magnetoresistive device
View Patent ↗The method provides a magnetoresistive device. The magnetoresistive device is formed from a plurality of magnetoresistive layers. The method includes providing a mask. The mask covers a first portion of the magnetoresistive element layers in at least one device area. The magnetoresistive element(s) are defined using the mask. The method includes depositing hard bias layer(s). The method also includes providing a hard bias capping structure on the hard bias layer(s). The hard bias capping structure includes a first protective layer and a planarization stop layer. The first protective layer resides between the planarization stop layer and the hard bias layer(s). The method also includes performing a planarization. The planarization stop layer is configured for the planarization.
1. A method for providing at least one magnetoresistive device, the magnetoresistive device being formed from a plurality of magnetoresistive element layers, the method comprising:
providing a mask, the mask covering a first portion of the plurality of magnetoresistive element layers in at least one device area;
defining at least one magnetoresistive element from the plurality of magnetoresistive element layers using the mask;
depositing at least one hard bias layer;
providing a hard bias capping structure on the at least one hard bias layer, the hard bias capping structure including a first protective layer, a second protective layer, and a planarization stop layer, the first protective layer residing between the planarization stop layer and the at least one hard bias layer, the planarization stop layer residing between the first protective layer and the second protective layer; and
performing a planarization, the planarization stop layer being configured for the planarization.
2. The method of claim 1 wherein the first protective layer includes at least one of Ru, Ta, Cr, and NiCr.
3. The method of claim 2 wherein the first protective layer has a thickness of at least twenty and not more than one hundred and five Angstroms.
4. The method of claim 3 wherein the thickness is at least forty and not more eighty Angstroms.
5. The method of claim 1 wherein the planarization stop layer further includes at least one of Ru and Rh.
6. The method of claim 5 wherein the planarization stop layer has a thickness of at least ten and not more than one hundred twenty Angstroms.
7. The method of claim 6 wherein the thickness is at least thirty and not more than seventy Angstroms.
8. The method of claim 1 wherein the second protective layer further includes at least one of Ta, Ru, Cr and NiCr.
9. The method of claim 8 wherein the second protective layer has a thickness of at least forty and not more than one hundred and five Angstroms.
10. The method of claim 9 wherein the thickness is at least fifty and not more than eighty-five Angstroms.
11. The method of claim 1 wherein the at least one magnetoresistive element has a track width of not more than ninety nanometers.
12. The method of claim 1 wherein the mask includes at least one side substantially free of undercuts.
13. A method for providing at least one magnetoresistive device, the magnetoresistive device being formed from a plurality of magnetoresistive element layers, the method comprising:
providing a mask, the mask covering a first portion of the plurality of magnetoresistive element layers in at least one device area;
defining at least one magnetoresistive element from the plurality of magnetoresistive element layers using the mask;
depositing at least one hard bias layer;
providing a hard bias capping structure on the at least one hard bias layer, the hard bias capping structure including a first protective layer, a second protective layer, and a planarization stop layer, the first protective layer residing between the planarization stop layer and the at least one hard bias layer, the planarization stop layer residing between the first protective layer and the second protective layer; and
performing a lift-off of the mask after the hard bias capping structure has been provided; and
performing a planarization, the planarization stop layer being configured for the planarization.
14. The method of claim 13 wherein the step of performing the lift-off further includes:
removing a portion of the at least one hard bias layer to open an aperture in the at least one hard bias layer, at least a portion of the hard bias capping structure being exposed in the step of removing the portion of the at least one hard bias layer.
15. A method for providing at least one magnetoresistive device, the magnetoresistive device being formed from a plurality of magnetoresistive element layers, the method comprising:
providing a photoresist mask, the photoresist mask covering a first portion of the plurality of magnetoresistive element layers in at least one device area;
defining at least one magnetoresistive element from the plurality of magnetoresistive element layers using the photoresist mask;
depositing at least one hard bias layer;
providing a hard bias capping structure including a first protective layer, a planarization stop layer, and a second protective layer, the planarization stop layer residing between the first protective layer and the second protective layer, the first protective layer residing between the planarization stop layer and the at least one hard bias layer, the first protective layer including at least one of Ta, Ru, Cr, and NiCr, the planarization stop layer including at least one of Ru and Rh, the second protective layer including at least one of Ru, Ta, Cr, and NiCr;
removing a portion of the at least one hard bias layer to open an aperture in the at least one hard bias layer, at least a portion of the hard bias capping structure being exposed in the step of removing the portion of the at least one hard bias layer;
lifting off the photoresist mask; and
performing a planarization, the planarization stop layer being configured for the planarization.