IP Library › Patent Application 12065586
Patent Application Utility PCT National Stage
App. No. 12/065,586 · Confirmation No. 1203

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, DIELECTRIC WINDOW USED THEREIN, AND MANUFACTURING METHOD OF SUCH A DIELECTRIC WINDOW

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2012-05-11 CTNF Non-Final Rejection 14 View
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2012-05-11 1449 List of References cited by applicant and considered by examiner 1 View
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Quick Facts
App. No.
12/065,586
Filed
2008-09-16
Effective Filing
2008-03-03
Pub. No.
US20090130335A1
Art Unit
1716