Double-ended tuning fork type piezoelectric resonator and pressure sensor
View Patent ↗To provide a double-ended tuning fork type piezoelectric resonator that includes: a piezoelectric element having two arm portions disposed in parallel, a first supporting portion that support one ends of each of the arm portions, a second supporting portion that support the other ends of each of the arm portions; and an exciting electrode formed on a surface of each of the arm portions, and has a structure suitable for being built into a pressure sensor as a pressure sensitive element. A double-ended tuning fork type piezoelectric resonator includes: a piezoelectric element 3 having two arm portions 4 disposed in parallel and apart from each other, and a first supporting portion 5 and a second supporting portion 6 that respectively support one ends and the other ends of each of the arm portions; and an exciting electrode 7 formed on a surface of each arm portion. In the resonator, an annular linking piece 8 is provided to link the first and the second supporting portions to dispose the two arm portions in an internal space of the annular linking piece.
1. A double-ended tuning fork type piezoelectric resonator, comprising:
a piezoelectric element having two arm portions that are disposed in parallel and apart from each other, the two arm portions each having a first end and a second end, a first supporting portion that directly connects to the first ends of the two arm portions, and a second supporting portion that directly connects to the second ends of the two arm portions; and
an exciting electrode formed on a surface of each of the arm portions, wherein an annular linking piece is provided to link the first and the second supporting portions to dispose the two arm portions in an internal space of the annular linking piece.
2. A pressure sensor, comprising the double-ended tuning fork type piezoelectric resonator according to claim 1 ; and
a first diaphragm substrate and a second diaphragm substrate that air-tightly seal the two arm portions by respectively being bonded to a front surface side and a back surface side of the double-ended tuning fork type piezoelectric resonator, wherein the first and the second diaphragm substrates are respectively bonded to a front surface and a back surface of the annular linking piece of the double-ended tuning fork type piezoelectric resonator to house the two arm portions in an air-tight space formed in an internal space of the annular linking piece without making contact with an inside wall of the air-tight space.
3. The pressure sensor according to claim 2 , wherein the first and the second diaphragm substrates include:
plate-like portions that are faced and disposed apart from each other to a front surface side and a back surface side of the two arm portions; and
annular thick portions each of which is provided at an outer circumference end of each of the plate-like portions and that are respectively tightly bonded to the front and the back surfaces of the annular linking piece.
4. The pressure sensor according to claim 2 , wherein the annular linking piece has a thickness larger than a thickness of the two arm portions, and wherein the first and the second diaphragm substrates include plate-like portions that are faced and disposed apart from each other to a front surface side and a back surface side of the two arm portions, and an inside surface along the outer circumference end of each of the plate-like portions is tightly bonded to the front and the back surfaces of the annular linking piece having the thick thickness.
5. The pressure sensor according to claim 2 , further comprising a recess formed on an outer side surface of each of the first and the second diaphragm substrates to concentrate a tensile stress to the two arm portions when a pressure is applied.
6. The pressure sensor according to claim 3 , further comprising a recess formed on an outer side surface of each of the first and the second diaphragm substrates to concentrate a tensile stress to the two arm portions when a pressure is applied.
7. The pressure sensor according to claim 4 , further comprising a recess formed on an outer side surface of each of the first and the second diaphragm substrates to concentrate a tensile stress to the two arm portions when a pressure is applied.