Device comprising a piezoelectric resonator element, method for producing the same and method for outputting a signal depending on a resonant frequency
The invention relates to a device ( 31 ) which comprises at least one piezoacoustic resonator element ( 2 ) having a piezoelectric layer ( 32 ) and two electrodes that are electrically contacted to the piezoelectric layer ( 32 ). The piezoacoustic resonator element ( 2 ) is configured in such a manner that, when a voltage is applied to the piezoelectric layer ( 32 ), a thickness oscillation of the piezoelectric layer ( 32 ) is excited via the electrodes with a resonant frequency. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element ( 2 ), a temperature measurement device ( 3 ) having a measuring element ( 37 ) that is configured as a thin layer.
1. A device comprising:
at least one piezoacoustic resonator element ( 2 ) having a piezoelectric layer ( 32 ); and
two electrodes that are contacted electrically with the piezoelectric layer ( 32 ),
wherein the piezoacoustic resonator element ( 2 ) is configured in such a manner that, upon voltage being applied to the piezoelectric layer ( 32 ), a bulk acoustic wave of the piezoelectric layer ( 32 ) is induced with a resonant frequency by way of the electrodes,
further comprising a temperature measuring device ( 3 ) implemented to be integrated with the piezoacoustic resonator element ( 2 ) being present, which includes a measuring element implemented using thin film technology,
the temperature measuring device ( 3 ) and the piezoacoustic resonator element ( 2 ) being embodied using thin film technology (Fn) on a common carrier substrate ( 35 ) and an electrode of the resonator element ( 2 ) and the temperature measuring device ( 3 ) being arranged as layers on the carrier substrate ( 35 ), with
a layer thickness of the temperature measuring device amounting <25 μm and the device being configured as a sensor element for detecting a substance with a piezoacoustic resonator element ( 2 ), whereby the piezoacoustic resonator element ( 2 ) has a surface section for sorption of the substance and the output signal from the resonator element ( 2 ) is dependent on the sorption of the substance, with an acoustic mirror ( 36 ) being arranged between the piezoacoustic resonator element ( 31 ) and the carrier substrate ( 35 ), in order to amplify the acoustic signal,
the temperature measuring device ( 3 ) being positioned at such a position of the sensor element that the temperature measuring device ( 3 ) is in contact with a measuring medium during the measuring process of the sensor element, in which the substance to be detected is located, and that the measuring element, the temperature measuring device ( 3 ) and also a heating element of the heating facility can be operated, with an external evaluation device ( 4 ) or evaluation device implemented to be integrated in the device being provided to determine the temperature from the change in resistance of the measuring element as a function of the temperature, by means of which the balance conditions of the sorption of the substance to be detected on the surface section of the piezoacoustic resonator element ( 2 ) are targetedly controlled by controlling the temperature.
2. The device as claimed in claim 1 , wherein the carrier substrate ( 35 ) consists of a semiconductor material.
3. The device as claimed in claim 1 , wherein the measuring element is implemented as a metallic conductor.
4. The device as claimed in claim 1 , wherein the measuring element essentially consists of platinum.
5. The device as claimed in claim 1 , wherein an acoustic mirror ( 36 ) comprising a plurality of layers is arranged between the carrier substrate ( 35 ) and the piezoacoustic resonator element ( 2 ).
6. The device as claimed in claim 1 , further comprising: a the heating element and the piezoelectric layer ( 32 ) are separated by less than 100 μm.
7. The device as claimed in claim 1 , wherein the piezoacoustic resonator element ( 2 ) is implemented as an array, comprising a plurality of piezoelectric layers ( 32 ) with corresponding electrodes and at least one temperature measuring device ( 3 ).
8. The device as claimed in claim 1 , further comprising:
a heating facility implemented so as to be integrated with the piezoacoustic resonator element ( 2 ).
9. The device as claimed in claim 1 , further comprising:
a correction facility ( 8 ) for correcting the resonant frequency of the piezoacoustic resonator element ( 2 ) on the basis of the value detected by the temperature measuring device ( 3 ).
10. The method for outputting a signal which depends on a resonant frequency, comprising:
detecting the operating temperature of a piezoacoustic resonator element ( 2 ) of the device as claimed in claim 1 , by a temperature measuring device ( 3 ),
exciting a volume oscillation of the piezoelectric layer ( 32 ) of the piezoacoustic resonator element ( 2 ) with resonance frequency,
outputting an output signal as a function of the measured operating temperature.
11. The method as claimed in claim 10 , further comprising:
outputting an output value as a function of the measured resonant frequency.
12. The method as claimed in claim 10 , the method further comprising:
detecting a substance comprising the steps of:
bringing together a surface section of the piezoacoustic resonator ( 31 ) set up for the sorption of the substance with a fluid which contains the substance to be detected, and
measuring the resonant frequency as a function of the quantity of the accumulated substance.
13. The method as claimed in claim 10 , further comprising:
controlling the operating temperature of the piezoacoustic resonator element ( 2 ).