Method for removing static electricity from a plate

1 . A method for removing static electricity from a first plate in a processing chamber including a substrate on the first plate and a second plate opposite the first plate, the method comprising:

generating static electricity in the first plate to adhere the substrate to the first plate; and

supplying argon gas into the processing chamber to remove the static electricity.

2 . The method as claimed in claim 1 , further comprising processing the substrate on the first plate.

3 . The method as claimed in claim 2 , wherein processing the substrate on the first plate includes forming at least one thin film thereon.

4 . The method as claimed in claim 3 , wherein forming the thin film includes depositing silver or silver alloy on the substrate.

5 . The method as claimed in claim 3 , wherein processing the substrate on the first plate further includes etching the thin film by using plasma.

6 . The method as claimed in claim 2 , wherein processing the substrate on the first plate includes forming silver or silver alloy electrodes thereon.

7 . The method as claimed in claim 1 , wherein generating static electricity includes applying voltage to the first plate

8 . The method as claimed in claim 7 , further comprising disconnecting the voltage from the first plate before supplying the argon gas.

9 . The method as claimed in claim 1 , wherein generating static electricity includes using an electrostatic chuck as a first plate.

10 . The method as claimed in claim 1 , further comprising detaching the substrate from the first plate by raising a lift pin through the first plate after removing the static electricity from the first plate.

11 . The as claimed in claim 1 , further comprising removing the substrate from the processing chamber after removing the static electricity from the first plate.