Semiconductor substrate, semiconductor device, method for manufacturing semiconductor substrate, and method for manufacturing semiconductor device
View Patent ↗A semiconductor substrate comprising: a semiconductor base; dielectric layers of mutually different film thicknesses formed on the semiconductor base; and semiconductor layers of mutually different film thicknesses formed on the dielectric layers.
1. A semiconductor substrate characterized in comprising:
a semiconductor base;
a first dielectric layer formed on the semiconductor base, the first dielectric layer having a first thickness;
a second dielectric layer formed on the semiconductor base, the second dielectric layer having a second thickness different from the first thickness;
a first semiconductor layer formed on the first dielectric layer, the first semiconductor layer having a third thickness, the first semiconductor layer being a single crystal semiconductor layer;
a second semiconductor layer formed on the second dielectric layer, the second semiconductor layer having a fourth thickness different from the third thickness, the second semiconductor layer being a single crystal semiconductor layer; and
a third semiconductor layer formed between the semiconductor base and the second dielectric layer, the third semiconductor layer being a single crystal semiconductor layer.
2. The semiconductor substrate of claim 1 , wherein the first semiconductor layer is formed immediately on the first dielectric layer.
3. The semiconductor substrate of claim 1 , wherein the second semiconductor layer is formed immediately on the second dielectric layer.
4. The semiconductor substrate of claim 1 , wherein the first dielectric layer is formed immediately on the semiconductor base.
5. A semiconductor substrate characterized in comprising:
a semiconductor base;
a first dielectric layer formed on the semiconductor base, the first dielectric layer having a first thickness;
a second dielectric layer formed on the semiconductor base, the second dielectric layer having a second thickness different from the first thickness;
a first semiconductor layer formed on the first dielectric layer to form a first semiconductor element having a first breakdown voltage for a first usage, the first semiconductor layer having a third thickness, and the first semiconductor layer being a single crystal semiconductor layer;
a second semiconductor layer formed on the second dielectric layer to form a second semiconductor element having a second breakdown voltage different from the first breakdown voltage for a second usage different from the first usage, the second semiconductor layer having a fourth thickness different from the third thickness, and the second semiconductor layer being a single crystal semiconductor layer; and
a third semiconductor layer formed between the semiconductor base and the second dielectric layer, the third semiconductor being a single crystal semiconductor layer.
6. The semiconductor substrate of claim 5 , wherein the first semiconductor layer is formed immediately on the first dielectric layer.
7. The semiconductor substrate of claim 5 , wherein the second semiconductor layer is formed immediately on the second dielectric layer.
8. The semiconductor substrate of claim 5 , wherein the first dielectric layer is formed immediately on the semiconductor base.
9. A semiconductor device characterized in comprising:
a semiconductor base;
a first dielectric layer formed on the semiconductor base, the first dielectric layer having a first thickness;
a second dielectric layer formed on the semiconductor base, the second dielectric layer having a second thickness different from the first thickness;
a first semiconductor layer formed on the first dielectric layer, the first semiconductor layer having a third thickness, and the first semiconductor layer being a single crystal semiconductor layer;
a second semiconductor layer formed on the second dielectric layer, the second semiconductor layer having a fourth thickness different from the third thickness, and the second semiconductor layer being a single crystal semiconductor layer; and
a third semiconductor layer formed between the semiconductor base and the second dielectric layer, the third semiconductor layer being a single crystal semiconductor layer,
wherein the first and second semiconductor layers form semiconductor elements having different breakdown voltages for mutually different usages formed on the semiconductor base and the semiconductor layers.
10. The semiconductor device of claim 9 , wherein the first semiconductor layer is formed immediately on the first dielectric layer.
11. The semiconductor device of claim 9 , wherein the second semiconductor layer is formed immediately on the second dielectric layer.
12. The semiconductor device of claim 9 , wherein the first dielectric layer is formed immediately on the semiconductor base.