Thin film transistor, organic light emitting display device including the same, and method of manufacturing the organic light emitting display device
View Patent ↗A thin film transistor, e.g., for use in an organic light emitting display, may include: a gate insulating layer disposed on a gate electrode located on a substrate; a semiconductor layer, disposed on the gate insulating layer; and a planarization layer disposed on the gate insulating layer, the source and drain electrodes, and the channel area, and having openings exposing parts of the first source and drain areas and the source and drain electrodes, respectively. The semiconductor layer may include: a channel area corresponding to the gate electrode; first source and drain areas doped with an impurity outside the channel area; second source and drain areas, including a metal, outside the first source and drain areas; and source and drain electrodes disposed on the second source and drain areas and exposing the first source and drain areas. A pixel electrode may be disposed in one of the openings.
1. A thin film transistor, comprising:
a substrate;
a gate electrode disposed on the substrate;
a gate insulating layer disposed on the gate electrode and the substrate;
a semiconductor layer, disposed on the gate insulating layer, including at least the following:
a channel area corresponding to the gate electrode,
first source and drain areas doped with an impurity outside the channel area, and
second source and drain areas, including a metal, outside the first source and drain areas;
source and drain electrodes overlapping substantially an entire length of the second source and drain areas and exposing the first source and drain areas, end parts of the source and drain electrodes being vertically aligned with end parts of the semiconductor layer;
a planarization layer disposed on the gate insulating layer, the source and drain electrodes, and the channel area, and the planarization layer having openings exposing parts of the first source and drain areas and the source and drain electrodes; and
a pixel electrode disposed on the planarization layer and electrically connected to at least one of the source and drain electrodes through one of the openings, the pixel electrode being in direct contact with the parts of the first source and drain areas exposed through one of the openings in the planarization layer.
2. The thin film transistor as claimed in claim 1 , wherein the metal included in the second source and drain areas includes a metal forming the source and drain electrodes.
3. The thin film transistor as claimed in claim 2 , wherein the metal forming the source and drain electrodes includes at least one of Al, Cu, Mo, W, Cr, and Pt.
4. The thin film transistor as claimed in claim 1 , wherein the semiconductor layer includes polycrystalline silicon.
5. The thin film transistor as claimed in claim 1 , further comprising a buffer layer disposed on the substrate.
6. An organic light emitting display device, comprising:
a substrate;
a gate electrode disposed on the substrate;
a gate insulating layer disposed on the gate electrode and the substrate;
a semiconductor layer, disposed on the gate insulating layer, including at least the following:
a channel area corresponding to the gate electrode,
first source and drain areas doped with an impurity outside the channel area, and
second source and drain areas, including a metal, outside the first source and drain areas;
source and drain electrodes overlapping substantially an entire length of the second source and drain areas and exposing the first source and drain areas, end parts of the source and drain electrodes being vertically aligned with end parts of the semiconductor layer;
a planarization layer disposed on the gate insulating layer, the source and drain electrodes, and the channel area, and the planarization layer having openings exposing parts of the first source and drain areas and the source and drain electrodes;
a pixel electrode disposed on the planarization layer and electrically connected to at least one of the source and drain electrodes through one of the openings, the pixel electrode being in direct contact with the parts of the first source and drain areas exposed through one of the openings in the planarization layer;
a pixel defining layer disposed on the planarization layer and the pixel electrode and exposing a part of the pixel electrode;
an organic emission layer disposed on the exposed pixel electrode; and
an opposite electrode disposed on the organic emission layer.
7. The organic light emitting display device as claimed in claim 6 , further comprising a spacer disposed on the pixel defining layer.
8. The organic light emitting display device as claimed in claim 7 , wherein the pixel defining layer and the spacer are formed of the same material.
9. A method of manufacturing a thin film transistor, the method comprising:
providing a starting structure including a substrate and a gate electrode disposed on the substrate, a gate insulating layer disposed on the gate electrode and the substrate, and a semiconductor layer disposed on the gate insulating layer;
simultaneously patterning the semiconductor layer and the conductive layer and forming source and drain electrodes, a channel area corresponding to the gate electrode, first source and drain areas outside the channel areas, and second source and drain areas outside the first source and drain areas, wherein end parts of the source and drain electrodes are vertically aligned with end parts of the semiconductor layer, and the source and drain electrodes overlap substantially an entire length of the second source and drain areas;
forming a planarization layer on the gate insulating layer, the source and drain electrodes, and the channel area;
forming openings in the planarization layer to expose parts of the first source and drain areas and of the source and drain electrodes;
doping the first source and drain areas with an impurity; and
dispersing a metal of the source and drain electrodes into at least the second source and drain areas of the semiconductor layer; and
disposing a pixel electrode on the planarization layer;
the pixel electrode being electrically connected to at least one the source and drain electrodes through one of the openings in the planarization layer, the pixel electrode being in direct contact with the parts of the first source and drain areas exposed through one of the openings in the planarization layer.
10. The method as claimed in claim 9 , wherein, in the dispersing of the metal into the second source and drain areas by heat treating, a temperature of the heat treating is equal to or higher than a melting point of the conductive layer.
11. The method as claimed in claim 9 , further comprising:
forming the pixel electrode in one of the source and drain electrodes in one of the openings;
forming a pixel defining layer on the pixel electrode;
patterning the pixel defining layer to expose a part of the pixel electrode; and
forming an organic emission layer and an opposite electrode on the pixel defining layer.
12. The method as claimed in claim 11 , further comprising forming a spacer on the pixel defining layer.
13. The method as claimed in claim 12 , wherein the pixel defining layer and the spacer are simultaneously patterned using a half-tone mask.
14. The method as claimed in claim 12 , wherein the pixel defining layer and the spacer are formed of the same material.
15. The method as claimed in claim 9 , further comprising forming a buffer layer on the substrate.
16. The method as claimed in claim 9 , wherein forming the semiconductor layer includes:
depositing an amorphous silicon layer on the gate electrode and on the gate insulating layer; and
crystallizing the amorphous silicon layer to form a polycrystalline silicon layer as the semiconductor layer.
17. The method as claimed in claim 9 , wherein simultaneously patterning the semiconductor layer and the conductive layer includes using a half-tone mask.