Semiconductor device and method of producing the same
View Patent ↗A semiconductor device includes a first field effect transistor and a second field effect transistor. The first field effect transistor includes a first gate electrode formed; first impurity diffused areas; and first sidewall portions. The first sidewall portions include a first lower insulation film and a first charge accumulation film. The second field effect transistor includes a second gate electrode; second impurity diffused areas; and second sidewall portions. The second sidewall portions include a second lower insulation film and a second charge accumulation film. The first lower insulation film contains one of a silicon thermal oxide film and a non-doped silicate glass, and the second lower insulation film contains a non-doped silicate glass. The second sidewall portions have a width along a gate longitudinal direction larger than that of the first sidewall portions. The second lower insulation film has a thickness larger than that of the first lower insulation film.
1. A method of producing a semiconductor device, comprising the steps of:
preparing a semiconductor substrate;
defining a first area and a second area on the semiconductor substrate;
laminating sequentially an insulation film and a conductive film in the first area and the second area on one of main surfaces of the semiconductor substrate;
patterning the conductive film to form a first gate electrode in the first area and a second gate electrode in the second area;
depositing a non-doped silicate glass over the semiconductor substrate for covering the first gate electrode and the second gate electrode;
removing the non-doped silicate glass on the first gate electrode;
forming a silicon thermal oxide film for covering the first gate electrode in the first area and the non-doped silicate glass in the second area on the semiconductor substrate through thermal oxidation;
forming a laminated film for sidewalls including a film for charge accumulation on the silicon thermal oxide film;
etching the laminated film for sidewalls, the silicon thermal oxide film in the first area, and the silicon thermal oxide film and the non-doped silicate glass in the second area in a direction perpendicular to the main surface of the semiconductor substrate to form a first sidewall portion on a sidewall of the first gate electrode and a second sidewall portion on a sidewall of the second gate electrode; and
introducing impurity ions at a high concentration with the first gate electrode, the first sidewall portion, the second gate electrode, and the second sidewall portion as a mask to form an impurity diffused area.
2. The method of producing a semiconductor device according to claim 1 , wherein, in the step of depositing the non-doped silicate glass, said non-doped silicate glass is deposited to have a thickness in a range of 5 nm to 20 nm; in the step of forming the silicon thermal oxide film, said silicon thermal oxide film is formed to have a thickness in a range of 5 nm to 20 nm; and in the step of forming the laminated film for sidewalls, said laminated film for sidewalls is formed to have a thickness in a range of 15 nm to 40 nm.
3. The method of producing a semiconductor device according to claim 1 , wherein, in the step of forming the laminated film for sidewalls, the film for charge accumulation, an insulation film for an upper portion, and a nitride film for sidewalls are sequentially formed on the silicon thermal oxide film.
4. The method of producing a semiconductor device according to claim 1 , wherein, in the step of forming the laminated film for sidewalls, after the film for charge accumulation is formed, impurity ions are introduced at a low concentration with the first gate electrode, the second gate electrode, the non-doped silicate glass, the silicon thermal oxide film, and the film for charge accumulation as a mask.
5. A method of producing a semiconductor device, comprising the steps of:
preparing a semiconductor substrate;
defining a first area and a second area on the semiconductor substrate;
laminating sequentially an insulation film and a conductive film in the first area and the second area on one of main surfaces of the semiconductor substrate;
patterning the conductive film to form a first gate electrode in the first area and a second gate electrode in the second area;
depositing a first non-doped silicate glass over the semiconductor substrate for covering the first gate electrode and the second gate electrode;
removing the first non-doped silicate glass in the first area;
depositing a second non-doped silicate glass on the semiconductor substrate in the first area for covering the first gate electrode;
depositing a second non-doped silicate glass on the first non-doped silicate glass in the second area;
forming a laminated film for sidewalls including a film for charge accumulation on the second non-doped silicate glass;
etching anisotropically the laminated film for sidewalls, the first non-doped silicate glass, and the second non-doped silicate glass in a direction perpendicular to the main surface of the semiconductor substrate to form a first sidewall portion on a sidewall of the first gate electrode and a second sidewall portion on a sidewall of the second gate electrode; and
introducing impurity ions at a high concentration with the first gate electrode, the first sidewall portion, the second gate electrode, and the second sidewall portion as a mask to form an impurity diffused area.
6. The method of producing a semiconductor device according to claim 5 , wherein, in the step of depositing the first non-doped silicate glass, said first non-doped silicate glass is deposited to have a thickness in a range of 5 nm to 20 nm; in the step of depositing the second non-doped silicate glass, said the second non-doped silicate glass is deposited to have a thickness in a range of 5 nm to 20 nm; and in the step of forming the laminated film for sidewalls, said laminated film for sidewalls is formed to have a thickness in a range of 15 nm to 40 nm.
7. The method of producing a semiconductor device according to claim 5 , wherein, in the step of forming the laminated film for sidewalls, the film for charge accumulation, an insulation film for an upper portion, and a nitride film for sidewalls are sequentially formed on the second non-doped silicate glass.
8. The method of producing a semiconductor device according to claim 5 , wherein, in the step of forming the laminated film for sidewalls, after the film for charge accumulation is formed, impurity ions are introduced at a low concentration with the first gate electrode, the second gate electrode, the first non-doped silicate glass, the second non-doped silicate glass, and the film for charge accumulation as a mask.