Chemical solution feeding apparatus and method for preparing slurry
View Patent ↗An apparatus for feeding slurry to an external device. The apparatus includes a preparation tank for preparing the slurry. A circulation pipe is connected to the preparation tank to circulate the slurry. A feeding pipe is connected between the preparation tank and the external device to feed the external device with the slurry. A pump sends the chemical solution in the preparation tank to the circulation pipe and the feeding pipe. A concentration detector is arranged downstream to the pump to detect the concentration of the slurry. A controller controls the concentration of the chemical solution in the preparation tank in accordance with the detection value of the concentration detector and controls the feeding of the chemical solution.
1. A method for manufacturing a semiconductor device, the method comprising:
determining an initial mixing amount of an oxidizing agent to be supplied to a preparation tank less than the amount required for the oxidizing agent to match a predetermined target concentration of the oxidizing agent in slurry;
under control of a controller, supplying a slurry stock solution and the determined initial mixing amount of the oxidizing agent to the preparation tank and mixing the slurry stock solution and the determined initial mixing amount of the oxidizing agent in the preparation tank so that the concentration of the oxidizing agent in the slurry is less than the predetermined target concentration;
detecting the concentration of the oxidizing agent in the slurry; then
under control of a controller, additionally supplying the oxidizing agent to the preparation tank in accordance with the detected result so that the concentration of the oxidizing agent in the slurry becomes equal to the predetermined value; and
polishing a wafer with the slurry in the preparation tank.
2. The method according to claim 1 , further comprising:
circulating the slurry in the preparation tank.
3. The method according to claim 1 , wherein the detecting includes detecting the concentration of the oxidizing agent in the slurry that is being circulated.
4. The method according to claim 1 , wherein the additionally supplying is performed in accordance with the concentration of the oxidizing agent in the slurry that is detected.
5. The method according to claim 1 , wherein the detecting the concentration of the oxidizing agent in the slurry includes detecting, with a concentration detector, the concentration of the oxidizing agent in the slurry that is being prepared and is being flown upwardly through the concentration detector.
6. The method according to claim 1 , wherein the polishing is to polish a metal film applied on the wafer.
7. The method according to claim 1 , further comprising:
supplying the slurry in the preparation tank to a CMP device where the polishing is performed.
8. The method according to claim 2 , wherein the supplying is performed through a concentration detector.