Resist pipe and resist coating device
View Patent ↗A resist pipe and a resist coating device are provided. Support portions are provided at an inner wall of a resist supply portion towards a cross-sectional center of the resist supply portion from three locations. The support portions are provided at equal intervals at the inner wall, and the leading ends thereof extend to positions at which a circular rod-shaped liquid level sensor portion is nipped by a peripheral surface of the liquid level sensor portion. In this manner, the support portions support the liquid level sensor portion from three directions, and gaps are formed between the liquid level sensor portion and the inner wall of the resist supply portion. The liquid level sensor portion inside the resist supply portion is supported by the support portions such that a sensing portion is substantially in the same plane as an inlet aperture of the resist supply portion.
1. A resist pipe, comprising:
a resist supply portion inserted into a container accommodating a resist liquid and configured to draw in the resist liquid, the resist supply portion having an inlet aperture and an inner wall; and
support portions provided at the inner wall of the resist supply portion, supporting a peripheral surface of a rod-shaped liquid level sensor portion from at least three directions, and setting a sensing portion at a leading end of the rod-shaped liquid level sensor portion in substantially the same plane as the inlet aperture, the support portions being provided at equal intervals at the inner wall of the resist supply portion, and gaps are formed between the rod-shaped liquid level sensor portion and the inner wall of the resist supply portion so as to ensure a space for the resist liquid to pass through.
2. A resist coating device comprising the resist pipe of claim 1 .
3. The resist pipe of claim 1 , wherein the inlet aperture is disposed at a bottom most location of the resist pipe.
4. The resist pipe of claim 1 , wherein the resist liquid enters into the resist pipe directly from the container via the inlet aperture.
5. The resist pipe of claim 1 , wherein the resist liquid is drawn out of the container via the gaps.
6. The resist pipe of claim 1 , wherein the rod-shaped liquid level sensor portion is solid.
7. The resist pipe of claim 1 , wherein the rod-shaped liquid level sensor portion is inserted into and disposed within the resist supply portion.
8. The resist pipe of claim 1 , wherein an end of the rod-shaped liquid level sensor portion that is inserted into the resist liquid is pointed.