Electronically controlled volume phase grating devices, systems and fabrication methods
Electrically controlled volume phase gratings and electrically controlled Bragg Gratings can provide variable diffraction gratings that can be operated in a transmissive and/or reflective mode. They can be made from electro-optic materials placed directly on glass or semiconductor materials, utilizing conventional Liquid Crystal on Silicon (LCOS) processes and equipment. Highly efficient and/or small device form factors may be provided.
1 . An electronically controlled volume phase grating device comprising:
a transparent substrate and a semiconductor substrate in closely spaced-apart relation, wherein the semiconductor substrate contains therein semiconductor logic circuitry;
a common electrode and patterned electrodes in closely spaced-apart relation between the transparent substrate and the semiconductor substrate; and
a blazed grating and a liquid crystal film between the common electrode and the patterned electrodes.