Changing method for separation facilitation head in chip mounting apparatus
In a chip mounting apparatus, a structure is employed that a separation facilitation head keeping part is provided for detachably keeping a plurality kinds of separation facilitation heads in a wafer ring holding part and a chip separation facilitation unit is allowed to access to the separation facilitation head keeping part by a moving mechanism to automatically carry out a changing operation for changing the separation facilitation head between the separation facilitation head keeping part and a separation facilitation head attaching part provided in the chip separation facilitation unit without annoying operator's hands. Thus, the separation facilitation head can be automatically changed to improve the operation rate of the apparatus.
1. A separation facilitation head changing method for changing a separation facilitation head in a chip mounting apparatus that mounts on a substrate a chip supplied under a state that the chip is stuck to a wafer sheet, the method comprising the steps of: providing said chip mounting apparatus comprising: a substrate holding part that holds the substrate;
a wafer ring holding part that holds a wafer ring on which the wafer sheet is extended;
a mounting head that mounts the chip picked up from the wafer sheet on the substrate held on the substrate holding part;
a chip separation facilitation unit provided with a separation facilitation head that facilitates the separation of the chip from the wafer sheet when the chip is picked up from the wafer sheet;
a unit moving device that moves the chip separation facilitation unit horizontally relatively to the wafer ring holding part; and
a separation facilitation head keeping part that is provided below the wafer ring holding part within a range accessible by the chip separation facilitation unit through the unit moving device to detachably keep a plurality of kinds of separation facilitation heads in horizontal position; changing the position of the separation facilitation head attaching part to which the separation facilitation head is detachably attached in the chip separation facilitation unit at least to the horizontal direction and the vertical direction;
allowing the chip separation facilitation unit to access to the separation facilitation head keeping part; and
delivering the separation facilitation head between the separation facilitation head keeping part and the separation facilitation head attaching part.
2. A separation facilitation head changing method in a chip mounting apparatus according to claim 1 , wherein the chip mounting apparatus includes a wafer ring changing unit that changes the wafer ring for other wafer ring accommodated in a magazine and while the wafer ring is changed by the wafer ring changing unit, the separation facilitation head is changed.