Semiconductor element and manufacturing method thereof
View Patent ↗A semiconductor element and a manufacturing method of the semiconductor element are provided. A ridge waveguide type semiconductor integrated element includes: an electrode of an EA portion and an electrode of an LD portion which are arranged so as to be away from each other; a contact layer of the EA portion and a contact layer of the LD portion which are arranged so as to be away from each other and in each of which the electrode is formed on an upper surface and an edge of at least a part of the upper surface is set to the same electric potential as that of the electrode; a passivation film as an insulative concave/convex structure extending from an edge of one of the two contact layers to an edge of the other contact layer; and a polyimide resin for embedding the passivation film.
1. A manufacturing method of a ridge waveguide type semiconductor integrated element having an optical modulator and a laser diode integrated, comprising:
forming onto a semiconductor substrate a multilayer structure having a layer which includes an optical modulator portion, a laser diode portion and a separating portion for electrically separating said optical modulator portion and said laser diode portion, a clad layer and a contact layer;
forming onto a substrate a concave- or convex-shaped concave/convex structure including a ridge type optical waveguide which optically connects said optical modulator portion with said laser diode portion;
embedding said concave/convex structure by an insulating resin, and forming an area in which said separating portion is located on said semiconductor substrate such that said area is swollen higher then said contact layer by said insulating resin; and
forming electrodes into respective areas on said contact layer of said optical modulator and said laser diode portion where said electrodes are formed onto said substrate in which said concave/convex structure has been embedded by said insulating resin.
2. A manufacturing method of a ridge waveguide type semiconductor integrated element according to claim 1 , wherein in the forming said concave/convex structure by said insulating resin, said insulating resin is extended from one end to the other end of said ridge waveguide type semiconductor integrated element between electrodes of said optical modulator portion and said laser diode portion.