Planar packageless semiconductor structure with via and coplanar contacts
View Patent ↗A semiconductor device includes a substrate having a first side and a second side and an epitaxial layer disposed over the second side. The device also includes a conductive via extending through the epitaxial layer to the second side and comprising a conductive contact; and a bond pad disposed over the epitaxial layer and comprising a conductive material, wherein the semiconductor is not provided in a package.
1. A semiconductor device, comprising:
a substrate having a first side and a second side;
a epitaxial layer disposed over the second side;
a conductive via extending through the epitaxial layer to the second side and comprising a conductive contact; and
a bond pad disposed over the epitaxial layer and comprising a conductive material, wherein the semiconductor device is not provided in a package.
2. A semiconductor device as claimed in claim 1 , wherein the via and the bond pad are substantially coplanar.
3. A semiconductor device as claimed in claim 1 , wherein the substrate comprises one of: Si, SiGe, SiC or a III-V semiconductor material.
4. A semiconductor device as claimed in claim 1 , wherein the epitaxial layer comprises one of Si, SiGe, SiC or a III-V semiconductor material.
5. A semiconductor device as claimed in claim 1 , wherein the epitaxial layer is undoped, and the substrate is doped.
6. A semiconductor device as claimed in claim 5 , wherein a region beneath the bond pad is p-doped and the semiconductor device comprises a PIN diode.
7. A semiconductor device as claimed in claim 6 , wherein the substrate is n-doped.
8. An electronic device as claimed in claim 5 , wherein a region beneath the bond pad is p-doped and the semiconductor device comprises a PIN diode.
9. An electronic device as claimed in claim 8 , wherein the second substrate is n-doped.
10. A semiconductor device as claimed in claim 1 , further comprising an alignment fiducial disposed over the second side of the substrate.
11. A semiconductor device as claimed in claim 1 , comprising an alignment fiducial disposed over the second side of the substrate and substantially opposite the bond pad and another alignment fiducial disposed over the second side of the substrate and substantially opposite the conductive via.
12. An electronic device, comprising:
a first substrate comprising an electrical circuit; and
a semiconductor device, comprising:
a second substrate having a first side and a second side;
a epitaxial layer disposed over the second side;
a conductive via extending through the epitaxial layer to the second side and comprising a conductive contact; and
a bond pad disposed over the epitaxial layer and comprising a conductive material, wherein the semiconductor device is not provided in a package.
13. An electronic device as claimed in claim 12 , wherein the via and the bond pad are substantially coplanar.
14. An electronic device as claimed in claim 13 , comprising an alignment fiducial disposed over the second side of the second substrate and substantially opposite the bond pad and another alignment fiducial disposed over the second side of the second substrate and substantially opposite the conductive via.
15. An electronic device as claimed in claim 12 , wherein the second substrate comprises one of: Si, SiGe, SiC or a III-V semiconductor material.
16. An electronic device as claimed in claim 12 , wherein the epitaxial layer comprises one of Si, SiGe, SiC or a III-V semiconductor material.
17. An electronic device, as claimed in claim 12 , wherein the epitaxial layer is undoped, and the second substrate is doped.
18. An electronic device as claimed in claim 12 , further comprising an alignment fiducial disposed over the second side of the second substrate.
19. A semiconductor device, comprising:
a substrate having a first side and a second side;
a epitaxial layer disposed over the second side;
a conductive via extending through the epitaxial layer to the second side and comprising a conductive contact; and
a bond pad disposed over the epitaxial layer and comprising a conductive material, wherein the semiconductor device is not provided in a package, wherein both the epitaxial layer and the substrate are doped.
20. An electronic device, comprising:
a first substrate comprising an electrical circuit; and
a semiconductor device, comprising:
a second substrate having a first side and a second side;
a epitaxial layer disposed over the second side, wherein both the epitaxial layer and the second substrate are doped;
a conductive via extending through the epitaxial layer to the second side and comprising a conductive contact; and
a bond pad disposed over the epitaxial layer and comprising a conductive material, wherein the semiconductor device is not provided in a package.