Image sensor and method for manufacturing the same
View Patent ↗An image sensor and method for manufacturing the same are provided. The image sensor can include an isolation area and active area on a substrate; a photodiode area and a transistor area provided on the active area; a gate insulating layer on the transistor area; and a gate electrode provided on the gate insulating layer and a portion of the photodiode area by extending over a portion of the isolation area between the transistor area and the photodiode area. In one embodiment, the gate electrode can be a gate electrode of a drive transistor of a 3-T type image sensor.
1. A method of manufacturing an image sensor, the method comprising the steps of:
forming an isolation area and defining an active area on a substrate;
forming a photodiode area and a transistor area on the active area;
forming a gate insulating layer on the transistor area, wherein forming the gate insulating layer on the transistor area comprises:
forming an insulating layer on an entire surface of the substrate; and
selectively etching the insulating layer such that the gate insulating layer remains on the transistor area and not on the photodiode area; and
forming a gate electrode on the gate insulating layer and over a portion of the isolation area onto a portion of the photodiode area.
2. The method according to claim 1 , wherein the gate insulating layer and the gate electrode provide a drive transistor.
3. The method according to claim 1 , wherein forming the gate electrode on the gate insulating layer and over the portion of the isolation area onto the portion of the photodiode area provides an electrical connection between the photodiode area and the gate electrode.
4. The method according to claim 1 , wherein the gate electrode includes polysilicon.
5. The method according to claim 1 , wherein forming the gate electrode on the gate insulating layer and over the portion of the isolation area onto the portion of the photodiode area comprises depositing a polysilicon layer on the substrate after selectively etching the insulating layer.