Method of manufacturing display unit using laser removal of organic material
View Patent ↗A laminated structure is formed by placing a cover substrate over a device substrate with a projection structure in between in the vacuum atmosphere. Next, the laminated structure is taken out into the air in a state that a space between the device substrate and the cover substrate is maintained in the vacuum atmosphere. Subsequently, the portion of the organic layer formed on the auxiliary electrode is removed by irradiating laser light to the laminated structure. Since the space between the device substrate and the cover substrate is maintained in the vacuum atmosphere, even if the laser light is emitted to the laminated structure taken out into the air, the laser light is emitted to the portion of the organic layer formed on the auxiliary electrode in the vacuum atmosphere.
1. A method of manufacturing a display unit having a plurality of organic light emitting devices on a substrate, the method comprising the steps of:
(a) forming a device substrate by forming a plurality of first electrodes, an auxiliary electrode in a region between the plurality of first electrodes, a projection structure made of an insulating material in a region between the plurality of first electrodes and the auxiliary electrode, and an organic layer covering the plurality of first electrodes and the auxiliary electrode over the substrate;
(b) selectively removing a portion of the organic layer formed on the auxiliary electrode; and
(c) forming a second electrode on the organic layer and the auxiliary electrode,
wherein, the step of selectively removing the portion of the organic layer formed on the auxiliary electrode includes the steps of:
(b1) first forming, prior to a removal of the portion of the organic layer formed on the auxiliary electrode, a laminated structure that includes a cover substrate and the device substrate by placing the cover substrate over the device substrate with the projection structure in between in the vacuum atmosphere,
(b2) after the step of forming the laminated structure, taking out the laminated structure into the air in a state such that at least a space between the cover substrate and the portion of the organic layer formed on the auxiliary electrode is maintained in the vacuum atmosphere prior to the removal of the portion of the organic layer formed on the auxiliary electrode,
(b3) thereafter, while at least the space between the cover substrate and the portion of the organic layer formed on the auxiliary electrode is being maintained in the vacuum atmosphere, irradiating laser light to the laminated structure on a cover substrate side so as to remove the portion of the organic layer formed on the auxiliary electrode, the auxiliary electrode being under the cover substrate while the laser light is being irradiated to remove the portion of the organic layer formed on the auxiliary electrode in the vacuum atmosphere, and
(b4) separating the cover substrate and the device substrate after the portion of the organic layer formed on the auxiliary electrode is removed with the laser light.
2. The method of manufacturing a display unit according to claim 1 , wherein the projection structure comprises:
a base provided in the region between the plurality of first electrodes and the auxiliary electrode; and
a rib provided on part of a top face of the base.
3. The method of manufacturing a display unit according to claim 1 , wherein the cover substrate includes a shielding film having an opening corresponding to a region to which the laser light is emitted.