Pattern designing method, pattern designing program and pattern designing apparatus

1. A pattern designing method, when executed, causes a processor to perform the steps of:

acquiring circuit design data, said circuit design data present, at least in part, in a technology file;

carrying out, via the processor, a transfer simulation calculation and a step simulation calculation by using physical layout data produced from the circuit design data;

comparing, via the processor, results of the transfer simulation calculation and the step simulation calculation with a preset standard;

carrying out, via the processor, calculation of electrical characteristics by using parameters obtained from the physical layout upon determining that the preset standard is fulfilled as a result of the comparison, and carrying out calculation of the electrical characteristics in which the result of the transfer simulation calculation and the step simulation calculation are reflected in the parameters upon determining that the preset standard is not fulfilled as a result of the comparison; and

updating, via the processor, the technology file in accordance with the comparison when the preset standard is not fulfilled, said updating occurring prior to the calculation for electrical characteristics.

2. The pattern designing method according to claim 1 , wherein the preset standard contains a tolerance for a width and a tolerance for a step in a pattern of the physical layout after completion of transfer.

3. The pattern designing method according to claim 1 , wherein the parameters used when the electrical characteristics are calculated contains a line width in a pattern of each of layers constituting the physical layout and an amount of dispersion in the line width, a thickness of an interlayer film of each of said layers and an amount of dispersion in the thickness, and a value of a permittivity and an amount of dispersion in the value of the permittivity.

4. A non-transitory computer readable medium having a pattern designing program stored thereon, the pattern designing method, when implemented by a processor, comprises:

acquiring circuit design data, said circuit design data present, at least in part, in a technology file;

carrying out transfer simulation calculation and a step simulation calculation by using physical layout data produced from the circuit design data;

comparing a results of the transfer simulation calculation and the step simulation calculation with a preset standard;

carrying out calculation of electrical characteristics by using parameters obtained from the physical layout upon determining that the preset standard is fulfilled as a result of the comparison, and carrying out calculation of the electrical characteristics in which the result of the transfer simulation calculation is reflected in the parameters upon determining that the preset standard is not fulfilled as a result of the comparison; and

updating the technology file in accordance with the comparison when the preset standard is not fulfilled, said updating occurring prior to the calculation for electrical characteristics.

5. A pattern designing apparatus, comprising:

means for acquiring circuit design data, said circuit design data present, at least in part in a technology file;

means for carrying out a transfer simulation calculation and a step simulation calculation by using physical layout data produced from the circuit design data, and comparing results of the transfer simulation calculation and the step simulation calculation with a preset standard;

means for (a) carrying out calculation of electrical characteristics by using parameters obtained from the physical layout upon determining that the preset standard is fulfilled as a result of the comparison, and (b) carrying out calculation of the electrical characteristics in which the result of the transfer simulation calculation are reflected in the parameters upon determining that the preset standard is not fulfilled,

wherein,

the technology file is updated in accordance with the comparison when the preset standard is not fulfilled, said update occurring prior to the calculation for electrical characteristics.

6. A pattern designing apparatus, comprising:

a section configured to acquire circuit design data, said circuit design data present, at least in part, in a technology file;

a section configured to carry out a transfer simulation calculation and a step simulation calculation by using physical layout data produced from the circuit design data, and compare results of the transfer simulation calculation and the step simulation calculation with a preset standard; and

a section configured to (a) carry out calculation of electrical characteristics by using parameters obtained from the physical layout upon determining that the preset standard is fulfilled, and (b) carry out calculation of the electrical characteristics in which the result of the transfer simulation calculation is reflected in the parameters upon determining that the preset standard is not fulfilled,

wherein,

the technology file is updated in accordance with the comparison when the preset standard is not fulfilled, said update occurring prior to the calculation for electrical characteristics.