Gray scale mask
View Patent ↗A scale mask comprises a U-shaped source mask region, a drain mask region with an end extending into the source mask region, and a U-shaped light-blocking bar arranged between the source mask region and the drain mask region. Slits are formed between the source mask region and the light-blocking bar and between the light-blocking bar and the drain mask region, respectively, and first compensating regions are provided at inner sides of ends of the source mask region.
1. The gray scale mask for manufacturing a thin film transistor, comprising:
a U-shaped source mask region,
a drain mask region with an end extending into the source mask region, and
a U-shaped light-blocking bar arranged between the source mask region and the drain mask region with slits being formed between the source mask region and the light-blocking bar and between the light-blocking bar and the drain mask region, respectively,
wherein second compensating regions are provided at ends of the light-blocking bar; and
wherein the second compensating regions comprise:
a vertical straight bar connected with ends of the light-blocking bar;
a horizontal straight bar perpendicular to the vertical straight bar; and
a transition bar arranged between the vertical straight bar and the horizontal straight bar.
2. The gray scale mask according to claim 1 , wherein the interval between the transition bar and the vertical straight bar is a width of the slits, and the interval between the transition bar and the horizontal straight bar is a width of the slits.
3. The gray scale mask according to claim 1 , wherein a width of the horizontal straight bar is in a range of about 1.0 μm˜about 4.0 μm.
4. The gray scale mask according to claim 1 , wherein the horizontal straight bar is a rectangle with a height equal to a width of the light-blocking bar.
5. The gray scale mask according to claim 1 , wherein the horizontal straight bar comprises a plurality of rectangles spaced apart from each other, and each of the rectangles has a height equal to a width of the light-blocking bar.
6. The gray scale mask according to claim 1 , wherein first compensating regions are further provided at inner sides of ends of the source mask region, and the vertical straight bar is a rectangle which has a width equal to that of the light-blocking bar and a height equal to that of the first compensating regions.
7. The gray scale mask according to claim 1 , wherein the vertical straight bar comprises a plurality of rectangles arranged sequentially, an interval between adjacent rectangles equals to the width of the slit, and each of the rectangles has a width equal to that of the light-blocking bar.