Microchip and method of manufacturing microchip
A microchip formed by joining a first substrate having at least one recess on its surface and a second substrate, wherein small projections of 0.5 to 30 μm in height are formed on at least a part of the surface having the recess of the first substrate, and a coating formed of a surface processing agent is provided on at least a part of the surface having the small projections formed thereon, as well as a method of manufacturing the microchip, are provided. A microchip allowing easy inspection of the state of application or state of adhesion of liquid material such as a surface processing agent, and allowing accurate optical measurement without causing disturbance such as fluorescence, can be provided.
1. A method of manufacturing a microchip, comprising the steps of:
forming a first substrate having at least one recess on its surface and small projections of 0.5 to 30 μm in height formed on at least a part of the surface having said recess;
applying a surface processing agent on the surface having said recess;
removing said surface processing agent or a coating of said surface processing agent applied to a contact surface to be joined to a second substrate; and
joining said contact surface to be joined of said first substrate to the second substrate, to obtain a microchip.
2. The method of manufacturing a microchip according to claim 1 , wherein
said small projections are formed at least on the contact surface to be joined to said second substrate.
3. The method of manufacturing a microchip according to claim 1 , comprising, after the step of applying the surface processing agent, the step of
irradiating the surface having said small projections with light, to inspect the state of application of said surface processing agent.
4. The method of manufacturing a microchip according to claim 3 , wherein
the state of application of said surface processing agent is inspected by irradiating the surface having small projections with white light and by observing luminance of diffused reflection from the surface irradiated with white light.
5. The method of manufacturing a microchip according to claim 1 , further comprising, after the step of applying said surface processing agent, the step of
drying the applied surface processing agent to provide a coating; and
after the step of removing the surface processing agent or the coating formed of said surface processing agent, the step of irradiating the contact surface to be joined to said second substrate with light, to inspect the state of removal of said coating.
6. The method of manufacturing a microchip according to claim 5 , wherein
the state of removal of said coating is inspected by irradiating the contact surface to be joined to said second substrate with white light and by observing luminance of diffused reflection from the surface irradiated with white light.
7. A method of manufacturing a microchip, comprising the steps of:
forming a first substrate having at least one recess on its surface and small projections of 0.5 to 30 μm in height formed on at least a part of the surface having said recess;
applying a surface processing agent on the surface having said recess;
drying the applied surface processing agent to obtain a coating;
redissolving the coating formed on a contact surface to be joined to a second substrate;
removing the redissolved coating; and
joining said contact surface to be joined of said first substrate to the second substrate, to obtain a microchip.
8. The method of manufacturing a microchip according to claim 7 , wherein
said small projections are formed at least on the contact surface to be joined to said second substrate.
9. The method of manufacturing a microchip according to claim 7 , comprising, after the step of applying the surface processing agent, the step of
irradiating the surface having said small projections with light, to inspect the state of application of said surface processing agent.
10. The method of manufacturing a microchip according to claim 9 , wherein
the state of application of said surface processing agent is inspected by irradiating the surface having small projections with white light and by observing luminance of diffused reflection from the surface irradiated with white light.
11. The method of manufacturing a microchip according to claim 7 , further comprising, after the step of removing said redissolved coating, the step of irradiating the contact surface to be joined to said second substrate with light, to inspect the state of removal of said redissolved coating.
12. The method of manufacturing a microchip according to claim 11 , wherein
the state of removal of said redissolved coating is inspected by irradiating the contact surface to be joined to said second substrate with white light and by observing luminance of diffused reflection from the surface irradiated with white light.