Methods of forming light-emitting structures
Methods of forming light-emitting structures, as well as related devices and/or systems are described. In some cases, the methods utilize a layer transfer and/or layer separation step(s) used to form such structures.
1. A method comprising:
providing a material structure comprising an n-type layer, a p-type layer, and a light-generating layer between the n-type layer and the p-type layer;
implanting ions in the material structure;
forming gas regions from the ions implanted in the material structure; and
separating a first portion of the material structure comprising the entire light-generating layer from a second portion of the material structure, in part, due to the formation of the gas regions.
2. The method of claim 1 , wherein the implanting ions step comprises implanting ions through the n-type region, the p-type region, and the light-generating region.
3. The method of claim 2 , wherein the ions are selected from the group consisting of hydrogen ions, helium ions, and argon ions.
4. The method of claim 1 , wherein the material structure comprises a substrate.
5. The method of claim 1 , wherein the first portion comprises the n-type region and the p-type region.
6. The method of claim 1 , wherein the second portion comprises at least a portion of a first substrate.
7. The method of claim 1 , wherein the gas regions are formed by heating the material structure.
8. The method of claim 1 , wherein, after separation, a surface of the first portion is textured.
9. The method of claim 1 , wherein, after separation, the first portion is further processed to form a light-emitting diode.
10. The method of claim 1 , further comprising forming a patterned mask on a surface of the material structure prior to implanting.
11. The method of claim 10 , wherein the ions implanted into the material structure that pass through the patterned mask are implanted at different depths than ions implanted into the material structure that do not pass through the patterned mask.
12. The method of claim 1 , wherein the material structure comprises a plurality of light generating layers.
13. The method of claim 6 , wherein the first portion comprises a second substrate different from the first substrate.
14. The method of claim 8 , wherein the textured surface comprises a patterned surface.
15. The method of claim 14 , wherein the patterned surface comprises a photonic lattice.