Method of manufacturing semiconductor device
View Patent ↗A high-density N-type diffusion layer 116 formed in a separation area 115 makes it possible to reduce a collector current flowing through a parasitic NPN transistor 102 . Thus, a normal CMOS process can be used to provide a driving circuit and a data line driver which make it possible to improve resistance to possible noise occurring between adjacent terminals, while controlling a chip size.
1. A method of manufacturing a semiconductor device having at least one wiring layer therein and an air gap in any wiring layer area to reduce inter-wire capacity, the method comprising:
when forming the wiring layer in which an air gap is formed,
forming a first insulating film on a semiconductor substrate or a lower wiring layer;
forming a plurality of wires in an upper part of the first insulating film;
forming a first cap film on the wires;
forming a mask pattern on an air gap non-forming area of the first insulating film and the first cap film;
at least partly etching the first cap film and the first insulating film through the mask pattern to form a gap in an air gap forming area;
removing the mask pattern;
forming a second cap film on at least an area in which the first cap film was etched; and
depositing a second insulating film on the gap, the first cap film, and the second cap film to form the air gap from the gap in the air gap forming area.
2. The method of manufacturing the semiconductor device according to claim 1 , wherein the wires comprise a copper film or a copper alloy film.
3. The method of manufacturing the semiconductor device according to claim 1 , wherein each of the first cap film and the second cap film is any of a Co film, a Co alloy film, an Ni film, an Ni alloy film, a W film, a W alloy film, and a Cu alloy film.
4. The method of manufacturing the semiconductor device according to claim 1 , wherein the first insulating film is any of an SiO.sub.2 film, an SiOC film, an SiOF film, a BCB film, and an SiLK film.
5. A method of manufacturing a semiconductor device having at least one wiring layer therein and an air gap in any wiring layer area to reduce inter-wire capacity, the method comprising:
when forming the wiring layer in which an air gap is formed,
forming a first insulating film on a semiconductor substrate or a lower wiring layer;
forming a plurality of wires in an upper part of the first insulating film;
forming a first cap film on the wires;
forming a mask pattern on an air gap non-forming area of the first insulating film and the first cap film;
etching entirely away the first cap film through the mask pattern to form a gap in an air gap forming area;
removing the mask pattern;
forming a second cap film on the wiring layer in at least an area in the air gap forming area in which the first cap film was etched entirely away; and
depositing a second insulating film on the gap, and the second cap film to form the air gap.
6. The method of manufacturing the semiconductor device according to claim 5 , wherein the wires comprise a copper film or a copper alloy film.
7. The method of manufacturing the semiconductor device according to claim 5 , wherein the second cap film is any of a Co film, a Co alloy film, an Ni film, an Ni alloy film, a W film, a W alloy film, and a Cu alloy film.
8. The method of manufacturing the semiconductor device according to claim 5 , wherein the first insulating film is any of an SiO.sub.2 film, an SiOC film, an SiOF film, a BCB film, and an SiLK film.