Process for manufacturing voltage-controlled transistor
View Patent ↗The present invention provides a self-driven LDMOS which utilizes a parasitic resistor between a drain terminal and an auxiliary region. The parasitic resistor is formed between two depletion boundaries in a quasi-linked deep N-type well. When the two depletion boundaries pinch off, a gate-voltage potential at a gate terminal is clipped at a drain-voltage potential at said drain terminal. Since the gate-voltage potential is designed to be equal to or higher than a start-threshold voltage, the LDMOS is turned on accordingly. Besides, no additional die space and masking process are needed to manufacture the parasitic resistor. Furthermore, the parasitic resistor of the present invention does not lower the breakdown voltage and the operating speed of the LDMOS. In addition, when the two depletion boundaries pinch off, the gate-voltage potential does not vary in response to an increment of the drain-voltage potential.
1. A process for manufacturing a voltage-controlled transistor, comprising:
providing a substrate;
forming a quasi-linked deep well in said substrate, wherein the quasi-linked deep well is a single and continuous deep well, and is configured with a recess at an interface between the quasi-linked deep well and the substrate, wherein a mouth of the recess at the interface between the quasi-linked deep well and the substrate has a width ranging from 2 μm to 20 μm;
forming a well with complementary doping polarity to that of said quasi-linked deep well in said substrate;
forming an oxide layer over said substrate for serving as isolation structures;
forming a gate-oxide layer over said quasi-linked deep well;
forming heavy doping regions in said well with complementary doping polarity to that of said quasi-linked deep well;
forming a polysilicon gate layer over the gate-oxide layer;
forming an auxiliary region in the quasi-linked deep well;
forming an electrode layer connecting with the auxiliary region and the polysilicon gate layer; and
forming a conduction region in said well with complementary doping polarity to that of said quasi-linked deep well underlying a gate of said voltage-controlled transistor and near said quasi-linked deep well, wherein the conduction region is formed next to one of heavy doping regions.
2. The process as claimed in claim 1 , wherein the step of forming said quasi-linked deep well further comprises a step of performing a thermal driving process at 1000° C.˜1200° C. for 6˜12 hours.
3. The process as claimed in claim 1 , wherein the step of forming said well with complementary doping polarity to that of said quasi-linked deep well further comprises performing a thermal driving process at 900° C.˜1100° C. for 2˜6 hours.
4. The process as claimed in claim 1 , wherein the recess is filled in by the substrate.
5. The process as claimed in claim 1 , wherein the recess is configured with a reverse V-shape.