Nickel alloy precision force transducer with strain gauge elements
A precision force transducer having a spring element ( 1 ) whose load-dependent deflection is converted into an electrical signal by means of strain gauge elements ( 10 ). The spring element ( 1 ) is made of a precipitation-hardenable nickel-based alloy with a nickel content in the range of 36 to 60 percent and a chromium content in the range of 15 to 25 percent. The strain gauge elements ( 10 ) are composed of a polymer-free layered film system. This makes it possible to produce a precision force transducer that features great accuracy, low creep and low moisture sensitivity.
1. A precision force transducer comprising:
a spring element configured to produce a load-dependent deflection; and
at least one strain gauge element configured to convert the deflection into an electrical signal,
wherein the spring element is formed of a precipitation-hardenable nickel-based alloy having a nickel content of between 50 and 55 percent and a chromium content of between 17 and 21 percent, and
wherein the strain gauge element is formed of a polymer-free layered film system,
the precision force transducer further comprising at least one end piece respectively at least at one end of the spring element, wherein the end piece is formed of a material different from the alloy of the spring element,
wherein the end piece is welded to the spring element, and
wherein the spring element is configured as a parallel guide.
2. The precision force transducer as claimed in claim 1 , wherein the precipitation-hardenable nickel-based alloy has the material number 2.4668 according to EN 10027-2.
3. The precision force transducer as claimed in claim 1 , wherein the layered film system for the strain gauge element is sputtered.
4. The precision force transducer as claimed in claim 3 , further comprising at least one temperature-dependent sputtered film.
5. A precision force transducer comprising:
a spring element configured to produce a load-dependent deflection; and
at least one strain gauge element configured to convert the deflection into an electrical signal,
wherein the spring element is formed of a precipitation-hardenable nickel-based alloy having a nickel content of between 36 and 60 percent and a chromium content of between 15 and 25 percent, and
wherein the strain gauge element is formed of a polymer-free layered film system,
the precision force transducer further comprising at least one end piece respectively at least at one end of the spring element, wherein the end piece is formed of a material different from the alloy of the spring element,
wherein the end piece is welded to the spring element,
wherein the layered film system for the strain gauge element is sputtered, and
wherein the layered film system for the strain gauge element sputtered onto the spring element has the following layer sequence: insulating film of SiO 2 or Al 2 O 3 , strain-sensitive film of a ternary NiCr alloy, cover film of SiO 2 or Al 2 O 3 .