Solid-state imaging device and method for manufacturing the same
View Patent ↗It is an object of the present invention to provide a solid-state imaging device that can achieve a high sensitivity, finer pixels for increasing the number of pixels, a high-speed operation, and high image quality, and a method for manufacturing the same. There are provided a plurality of photoelectric conversion portions arranged in a matrix on a substrate, a vertical transfer channel arranged between vertical columns of the photoelectric conversion portions, a plurality of vertical transfer electrodes for transferring a charge of the photoelectric conversion portions to the vertical transfer channel, a light-shielding film that is laminated on the vertical transfer electrodes via a first insulating film and has a plurality of window portions, each defining a light-receiving portion of each of the photoelectric conversion portions, and a shunt wiring that is arranged in a region overlapping the vertical transfer channel and is insulated from the light-shielding film by a second insulating film. A driving pulse according to a drive phase of each of the vertical transfer electrodes is supplied from the shunt wiring.
1. A solid-state imaging device comprising:
a plurality of photoelectric conversion portions arranged in a matrix on a substrate;
a vertical transfer channel arranged between vertical columns of the photoelectric conversion portions;
a plurality of vertical transfer electrodes for transferring a charge of the photoelectric conversion portions to the vertical transfer channel;
a light-shielding film, laminated on the vertical transfer electrodes via a first insulating film, is divided by a slit portion formed in the region overlapping the vertical transfer channel with respect to each of the vertical columns of the photoelectric conversion portions, and has a plurality of window portions, each defining a light-receiving portion of each of the photoelectric conversion portions;
a stopper layer lamented on the vertical transfer electrodes corresponding to a bottom of the slit portion;
a shunt wiring that is arranged in a region overlapping the vertical transfer channel and is insulated from the light-shielding film by a second insulating film;
a connection opening formed in the stopper layer in the slit portion of the light-shielding film and the second insulating film;
a side wall member, formed separately from the second insulating film, and formed on the side face of the connection opening and the side surface of the slit portion in the light-shielding film in its long side direction; and
a leg portion is formed continuously in a direction in which the shunt wiring is arranged and enters the slit portion,
wherein a driving pulse according to a drive phase of each of the vertical transfer electrodes is supplied from the shunt wiring.
2. The solid-state imaging device according to claim 1 , wherein an antireflection film made of the same material as that for the stopper layer is formed in the light-receiving portion.
3. The solid-state imaging device according to claim 1 , wherein the connection opening has any one of a circular shape, an elliptical shape, and a rectangular shape.
4. The solid-state imaging device according to claim 1 , wherein the leg portion is positioned at a center of the connection opening.
5. The solid-state imaging device according to claim 1 , wherein the vertical transfer electrodes have a single layer structure.
6. The solid-state imaging device according to claim 1 , wherein the vertical transfer electrodes are made of polysilicon.
7. The solid-state imaging device according to claim 1 , wherein the light-shielding film is made of tungsten.
8. The solid-state imaging device according to claim 1 , wherein the shunt wirings are made of tungsten.
9. The solid-state imaging device according to claim 1 , wherein a thickness of the side wall member is 60 nm or more.
10. The solid-state imaging device according to claim 1 , wherein the stopper layer is made of polysilicon.