Method of fabricating polycrystalline silicon, TFT fabricated using the same, method of fabricating the TFT, and organic light emitting diode display device including the TFT
View Patent ↗A method of fabricating a polycrystalline silicon (poly-Si) layer includes providing a substrate, forming an amorphous silicon (a-Si) layer on the substrate, forming a thermal oxide layer to a thickness of about 10 to 50 Å on the a-Si layer, forming a metal catalyst layer on the thermal oxide layer, and annealing the substrate to crystallize the a-Si layer into the poly-Si layer using a metal catalyst of the metal catalyst layer. Thus, the a-Si layer can be crystallized into a poly-Si layer by a super grain silicon (SGS) crystallization method. Also, the thermal oxide layer may be formed during the dehydrogenation of the a-Si layer so that an additional process of forming a capping layer required for the SGS crystallization method can be omitted, thereby simplifying the fabrication process.
1. A thin film transistor (TFT) comprising:
a substrate;
a semiconductor layer disposed on the substrate and crystallized using a metal catalyst;
a thermal oxide layer disposed on the semiconductor layer and having a thickness of about 10 Å to 50 Å;
a gate insulating layer disposed on the thermal oxide layer;
a gate electrode disposed on the gate insulating layer;
an interlayer insulating layer disposed on the gate electrode; and
source and drain electrodes disposed on the interlayer insulating layer and electrically connected to source and drain regions of the semiconductor layer,
wherein the semiconductor layer includes the metal catalyst in a concentration of 1×10 9 to 1×10 13 atoms/cm 2 in the semiconductor layer at a distance of about 100 Å from a contact surface between the semiconductor layer and the thermal oxide layer.
2. The TFT according to claim 1 , wherein the thermal oxide layer has a thickness of about 17 Å to 26 Å.
3. The TFT according to claim 1 , wherein the semiconductor layer is crystallized by a super grain silicon (SGS) crystallization method.
4. An organic light emitting diode (OLED) display device comprising:
a substrate;
a semiconductor layer disposed on the substrate and crystallized using a metal catalyst;
a thermal oxide layer disposed on the semiconductor layer and having a thickness of about 10 Å to 50 Å;
a gate insulating layer disposed on the thermal oxide layer;
a gate electrode disposed on the gate insulating layer;
an interlayer insulating layer disposed on the gate electrode;
source and drain electrodes disposed on the interlayer insulating layer and electrically connected to source and drain regions of the semiconductor layer;
a first electrode electrically connected to one of the source and drain electrodes;
an organic layer disposed on the first electrode and including an emission layer (EML); and
a second electrode disposed on the organic layer.
5. The OLED display device according to claim 4 , wherein the thermal oxide layer has a thickness of about 17 Å to 26 Å.
6. The OLED display device according to claim 4 , wherein the metal catalyst for crystallization is formed at a concentration of 1 10 9 to 1 10 13 atoms/cm 2 in the semiconductor layer at a distance of about 100 Å from a contact surface between the semiconductor layer and the thermal oxide layer toward the substrate.
7. The OLED display device according to claim 4 , wherein the semiconductor layer is crystallized by an SGS crystallization method.