IP Library Patent Application 12142875
Patent Application
App. No. 12/142,875

SEAL RING FOR SEMICONDUCTOR DEVICE

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Quick Facts
Patent No.
US None
App. No.
12/142,875
Abstract

A semiconductor device having a seal ring structure with high stress resistance is provided. The semiconductor device is provided with a semiconductor layer including a plurality of semiconductor elements, an insulating film formed on the semiconductor layer, and a body that passes through the insulating film and surrounds the semiconductor elements as a whole. The body includes a plurality of walls that are spaced apart from each other in a circumferential direction and are arranged in parallel with one another, and a plurality of bridges, each of which intersects at least one of the plurality of walls.

Claims (49)

1 . A semiconductor device comprising:

a semiconductor layer including semiconductor elements;

an insulating film formed over the semiconductor layer; and

a circumscribing body that extends into the insulating film and outlines an area overshadowing at lease a portion of the semiconductor elements,

wherein the circumscribing body includes walls which are spaced apart from each other in a circumferential direction and are arranged substantially in parallel, and bridges interconnecting at least two of the plurality of walls.

2 . The semiconductor device according to claim 1 ,

wherein at least two of the bridges are arranged to be substantially perpendicular to the at least two of the walls.

3 . The semiconductor device according to claim 2 ,

wherein the walls are arranged at equal circumferential intervals.

4 . The semiconductor device according to claim 1 ,

wherein the bridges interconnect the walls in an alternating manner between a right inclination direction and a left inclination direction.

5 . The semiconductor device according to claim 1 , further comprising a wiring layer in electrical communication with at least one of the semiconductor elements, where the walls and the at least one wiring layer comprise the same material.

6 . The semiconductor device according to claim 5 , where the walls and the Wiring layer comprise copper.

7 . The semiconductor device according to claim 5 , wherein:

the wiring layer includes a via plug that is formed through the insulating film that interconnects an upper wiring level and a lower wiring level which are spaced apart from each other; and

the walls and bridges are arranged at substantially the same depth as the via plug.

8 . The semiconductor device according to claim 1 ,

wherein the insulating film includes a low dielectric constant film whose relative dielectric constant is 3 or less.

9 . A semiconductor device comprising:

an active region formed over a semiconductor substrate;

a wiring formed over the semiconductor substrate and in electrical communication with the active region; and

an insulating barrier separating the active region from a seal ring at least partially circumscribing the active region, the seal ring comprising a first wall spaced apart from a second wall, where a first interconnection spans between the first wall and the second wall.

10 . The semiconductor device of claim 9 , wherein:

the wiring comprises a first wiring plug; and

the first wall, the second wall, the first interconnection, and the first wiring plug lie generally along a first level of the semiconductor device.

11 . The semiconductor device of claim 10 , wherein:

the wiring comprises a first wiring layer positioned over the first wiring plug and in electrical communication with the first wiring plug;

the seal ring includes a first seal wiring layer positioned over the first wall, the second wall, and the first interconnection, the first seal wiring layer in electrical communication with at least one of the first wall, the second wall, and the first interconnection; and

the first wiring layer lies generally along a second level of the semiconductor device as the first seal wiring layer;

the second level of the semiconductor device is over the first level of the semiconductor device.

12 . The semiconductor device of claim 11 , wherein:

the wiring comprises a second wiring plug; and

the seal ring includes a third wall, a fourth wall, and a second interconnection;

the second interconnection spans between the third wall and the fourth wall;

the third wall, the fourth wall, the second interconnection, and the second wiring plug lie generally along a third level of the semiconductor device; and

the third level of the semiconductor device is over the second level of the semiconductor device.

13 . The semiconductor device of claim 12 , wherein:

the wiring comprises a second wiring layer positioned over the second wiring plug and in electrical communication with the second wiring plug;

the seal ring includes a second seal wiring layer positioned over the third wall, the fourth wall, and the second interconnection, the second seal wiring layer in electrical communication with at least one of the third wall, the fourth wall, and the second interconnection;

the second wiring layer lies generally along a fourth level of the semiconductor device as the second seal wiring layer; and

the fourth level of the semiconductor device is over the third level of the semiconductor device.

14 . A method of fabricating a semiconductor device, comprising:

forming a first conductive plug within an insulating layer, the first conductive plug in electrical communication with the first wiring layer and within the active region of the semiconductor device;

forming a seal ring comprising a first wall, a second wall, and a bridge within an insulating layer outside of the active region of the semiconductor device, where the first wall is spaced apart from the second wall, but connected to the second wall by way of the bridge;

wherein formation of the first conductive plug occurs substantially contemporaneously with the formation of at least one of the first wall, the second wall, and the bridge.

15 . The method of claim 14 , further comprising:

forming a first wiring layer within an insulating layer and within an active region of a semiconductor device;

forming a first seal wiring layer within an insulating layer outside of the active region of the semiconductor device; and

wherein formation of the first wiring layer and the first seal wiring layer occur substantially contemporaneously.

Assignments (3)
CHANGE OF NAME Recorded Mar 21, 2014
From: OKI SEMICONDUCTOR CO., LTD
To: LAPIS SEMICONDUCTOR CO., LTD.
Reel/Frame 032495/0483 →
CHANGE OF NAME Recorded Jan 29, 2009
From: OKI ELECTRIC INDUSTRY CO., LTD.
To: OKI SEMICONDUCTOR CO., LTD.
Reel/Frame 022231/0935 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 21, 2008
From: TOKITOH, SHUNICHI
To: OKI ELECTRIC INDUSTRY CO., LTD.
Reel/Frame 021422/0451 →