ARRANGEMENT FOR COATING A CRYSTALLINE SILICON SOLAR CELL WITH AN ANTIREFLECTION/PASSIVATION LAYER
In the plasma pretreatment a substrate, preferably a silicon solar cell, is transported into a pretreatment chamber ( 1 ). In this pretreatment chamber ( 1 ) is contained a gas mixture comprising at least NH 3 or hydrogen. By means of a cathode ( 4 ) a plasma is generated in the pretreatment chamber ( 1 ) by means of a glow discharge. The atomic hydrogen in the plasma reacts hereby with the oxygen, which is located on the solar cell ( 25 ) in the form of an oxide layer. By modifying or removing the oxide layer, better passivation of the solar cell can be attained and, consequently, higher efficiency.
1 . Arrangement for coating a crystalline silicon solar cell with an antireflection/passivation layer, characterized by
a first chamber ( 1 , 40 ) in which
a silicon solar cell ( 25 , 35 , 51 , 65 ) is located,
an electric DC voltage can be applied for generating a glow discharge gap,
at least one gas supply ( 14 , 47 - 49 ) is provided, which introduces at least ammonia or hydrogen into the chamber ( 1 , 40 ),
a second chamber ( 32 , 41 ) in which a sputter device ( 33 , 34 , 63 , 64 ) for the coating of the silicon solar cell is provided,
a transport means ( 21 , 52 ) for the transport of the silicon solar cell ( 25 , 35 , 51 , 65 ) from the first chamber ( 1 , 40 ) into the second chamber ( 32 , 41 ).
2 . Arrangement as claimed in claim 1 , characterized in that the silicon solar cell ( 25 , 35 , 51 , 65 ) is disposed on a carrier ( 26 , 36 ).
3 . Arrangement as claimed in claim 1 , characterized in that between the first chamber ( 1 , 40 ) and the second chamber ( 32 , 41 ) a movable lock gate ( 37 , 37 ′) is disposed.
4 . Arrangement as claimed in claim 1 , characterized in that between the first chamber ( 1 , 40 ) and the second chamber ( 32 , 41 ) a lock chamber ( 39 ) is disposed.
5 . Arrangement as claimed in claim 1 , characterized in that in the first chamber ( 1 , 40 ) a cathode ( 4 , 43 ) is disposed, which is connected to a DC voltage source ( 5 ).
6 . Arrangement as claimed in claim 5 , characterized in that the DC voltage source ( 5 ) is connected to an anode ( 7 ) which is located in the first chamber ( 1 , 40 ).
7 . Arrangement as claimed in claim 1 , characterized in that a vacuum pump ( 19 , 50 ) is provided, which is connected with the first chamber ( 1 , 40 ) via a line.
8 . Arrangement as claimed in claim 1 , characterized in that the transport means ( 21 , 52 ) is a system of rollers ( 22 - 24 , 58 - 60 ).
9 . Arrangement as claimed in claim 1 , characterized in that the transport means ( 21 , 50 ) is a rail system.
10 . Arrangement as claimed in claim 1 , characterized in that the gas supply ( 14 , 47 - 49 ) is connected with at least one gas tank ( 8 - 10 , 44 - 46 ).
11 . Arrangement as claimed in claim 1 , characterized in that in the at least one gas tank NH 3 or hydrogen is provided.
12 . Arrangement as claimed in claim 10 , characterized in that three gas tanks ( 8 - 10 , 44 - 46 ) are provided, the first gas tank containing NH 3 , the second gas tank H 2 and the third gas tank Ar.