Method for defining a magnetoresistive junction using multiple mills at a plurality of angles
View Patent ↗A method and system define a magnetoresistive junction in a magnetic recording transducer. The method and system include performing a first mill at a first angle from a normal to the surface of the magnetic recording transducer. A second mill is performed at a second angle from the normal to the surface. The second angle is larger than the first angle. A third mill is performed at a third angle from the normal to the surface. The third angle is not larger than the first angle.
1. A method for defining a magnetoresistive junction in a magnetic recording transducer having a surface, the method comprising:
performing a first mill at a first angle from a normal to the surface;
performing a second mill at a second angle from the normal to the surface, the second angle being larger than the first angle; and
performing a third mill at a third angle from the normal to the surface, the third angle being not larger than the first angle;
wherein the third angle is not more than twelve degrees.
2. The method of claim 1 wherein at least one of the first mill, the second mill, and the third mill includes an ion mill.
3. The method of claim 1 wherein the first angle is at least twelve degrees.
4. The method of claim 3 wherein the first angle is not more than thirty degrees.
5. The method of claim 4 wherein the first angle is at least seventeen degrees and not more than twenty-five degrees.
6. The method of claim 1 wherein the second angle is at least sixty degrees.
7. The method of claim 6 wherein the second angle is not more than eighty degrees.
8. The method of claim 7 wherein the second angle is at least seventy degrees.
9. The method of claim 1 wherein the third angle is not more than nine degrees.
10. The method of claim 9 wherein the third angle is at least three degrees.
11. The method of claim 1 wherein the magnetoresistive junction includes a barrier layer and wherein the step of performing the first mill further includes:
terminating the first mill after a portion of the junction including the barrier layer is defined.
12. The method of claim 11 wherein the junction further includes a layer below the barrier layer and wherein the step of terminating the first mill further includes:
terminating the first mill before another portion of the junction including the layer is completely defined.
13. A method for defining a magnetoresistive junction in a magnetic recording transducer having a surface, the magnetoresistive junction including a barrier layer, the method comprising:
performing a first mill at a first angle from a normal to the surface, the first angle being at least twelve degrees and not more than thirty degrees, the first mill being terminated after a portion of the junction including the barrier layer is defined;
performing a second mill at a second angle from the normal to the surface, the second angle being at least sixty degrees;
performing a third mill at a third angle from the normal to the surface, the third angle being not more than nine degrees.