Photon induced cleaning of a reaction chamber
View Patent ↗The present invention provides a method for in-situ cleaning of walls of a reaction chamber, e.g. reactive ion etching chamber, to remove contamination, e.g. copper comprising contamination from the walls. The method comprises converting the contamination, e.g. copper comprising contamination into a halide compound, e.g. copper halide compound and exposing the halide compound, e.g. copper halide compound to a photon comprising ambient, thereby initiating formation of volatile halide products, e.g. volatile copper halide products. The method furthermore comprises removing the volatile halide products, e.g. volatile copper halide products from the reaction chamber to avoid saturation of the volatile halide products, e.g. volatile copper halide products in the reaction chamber in order to avoid re-deposition of the volatile halide products, e.g. volatile copper halide products to the walls of the reaction chamber.
1. A method for in-situ cleaning of walls of a reaction chamber to remove contamination from the walls, the method comprising:
converting contamination into a halide compound;
exposing the halide compound to a photon-comprising ambient by exposing the halide compound to a plasma comprising at least one gas selected from the group consisting of He, Ar, and H, thereby initiating formation of volatile halide products; and
removing the volatile halide products from the reaction chamber to avoid saturation of the volatile halide products in the reaction chamber.
2. The method of claim 1 , wherein converting the contamination into a halide compound is performed by exposing the contamination to a gas comprising halogen.
3. The method of claim 1 , wherein converting the contamination into a halide compound is performed by exposing the contamination to a plasma comprising halogen.
4. The method of claim 3 , wherein exposing the contamination to a plasma comprising halogen is performed by exposing the contamination to a plasma with a power of from about 200 Watt to about 1000 Watt, a pressure of from about 0.53 Pa to about 10.67 Pa and a flow rate of from about 50 sccm to about 500 sccm.
5. The method of claim 2 , wherein the halogen comprises at least one gas selected from the group consisting of BCl 3 /Cl 2 , HBr, I 2 , HCl, HI, Br 2 , and Cl 2 .
6. The method of claim 3 , wherein the halogen comprises at least one gas selected from the group consisting of BCl 3 /Cl 2 , HBr, I 2 , HCl, HI, Br 2 , and Cl 2 .
7. The method of claim 1 , wherein converting the contamination into a halide compound and exposing the halide compound to a photon-comprising ambient are performed simultaneously.
8. The method of claim 1 , wherein converting the contamination into a halide compound and exposing the halide compound to a photon-comprising ambient are performed sequentially.
9. The method of claim 1 , wherein the contamination comprise copper and wherein the halide compound is a copper halide compound.
10. The method of claim 9 , wherein the copper halide compound comprises CuCl x and the photon-comprising ambient is a He plasma, and wherein exposing the copper halide compound to the photon-comprising ambient is performed at a power of about 1000 Watt and a pressure of about 4 Pa.
11. The method of claim 9 , wherein the copper halide compound comprises CuBr x and the photon comprising ambient is a He plasma, and wherein exposing the copper halide compound to the photon comprising ambient is performed at a power of about 1000 Watt and a pressure of about 10.67 Pa.