Manufacturing method of multi-directional light scattering LED
View Patent ↗A multidirectional light scattering LED and a manufacturing method thereof are disclosed. A metal oxide is irregular disposed over a second semiconductor layer and then is removed by etching. Part of the second semiconductor layer, part of a light-emitting layer or part of the first semiconductor layer is also removed so as to form a scattering layer. A transparent conductive layer is arranged over the second semiconductor layer while further a second electrode is disposed over the transparent conductive layer. A first electrode is installed on the scattering layer. Thus light output from the LED is scattered in multi-directions.
1. A manufacturing method of multidirectional light scattering LED comprising steps of:
forming a substrate;
forming a first semiconductor layer over the substrate;
forming a light emitting layer over the first semiconductor layer;
forming a second semiconductor layer over the light emitting layer;
forming a metal oxide layer over the second semiconductor layer and a part of the first semiconductor layer and disposing the metal oxide layer thereof irregularly;
etching the metal oxide layer in the part of the first semiconductor layer and forming a scattering layer over part of the first semiconductor layer;
forming a transparent conductive layer and part of the transparent conductive layer covering over the second semiconductor layer;
forming a first electrode over the scattering layer; and
forming a second electrode over part of the second semiconductor layer and the transparent conductive layer.
2. The method as claimed in claim 1 , wherein after the step of etching, the method further having a step of:
forming a refractive layer over the second semiconductor layer and disposing the refractive layer thereof irregularly.