Scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s), and method of making article using combustion CVD
View Patent ↗A scratch resistant coated article is provided which is also resistant to attacks by at least some fluoride-based etchant(s) for at least a period of time. In certain example embodiments, an anti-etch layer(s) is provided on a glass substrate in order to protect the glass substrate from attacks by fluoride-based etchant(s), and an underlayer(s) deposited by flame pyrolysis may be provided under at least the anti-etch layer(s).
1. A coated article comprising:
a substrate;
a flame pyrolysis-deposited underlayer comprising silicon oxide on the substrate; and
an anti-etch layer comprising at least one material selected from the group consisting of: zirconium oxycarbide, tin oxycarbide, indium oxide and cerium oxide; and
wherein the anti-etch layer is on the substrate over at least the underlayer comprising silicon oxide, and wherein the anti-etch layer is resistant to at least some fluoride-based glass etchants.
2. The coated article of claim 1 , wherein the anti-etch layer comprises zirconium oxycarbide, and wherein the substrate is a glass substrate.
3. The coated article of claim 1 , wherein the coated article is a window.
4. The coated article of claim 1 , wherein the coated article has a visible transmission of at least about 50%.
5. The coated article of claim 1 , further comprising an ion beam-deposited layer comprising diamond-like carbon (DLC) on the glass substrate over the anti-etch layer.
6. The coated article of claim 1 , wherein the anti-etch layer is resistant to corrosion by fluoride inclusive etchants.
7. The coated article of claim 1 , wherein the anti-etch layer is at least about 2,500 Å thick.
8. The coated article of claim 1 , wherein the anti-etch layer is at least partially nitrided.