Magnetic head slider with diffusion stop films each of which is disposed between the associated terminal portion and lead portion or between the associated lead portion and seed film
View Patent ↗Embodiments of the present invention help to reduce the resistance variation of the heater provided in order to adjust the flying height of the slider. According to one embodiment, a magnetic head slider has a magnetic read/write device and a heater formed on the trailing end surface of the slider. The heater comprises a heating portion, terminal portions and lead portions. Where a terminal portion overlaps with a lead portion, a diffusion stop film is disposed between them. In addition, a diffusion stop film is disposed between a lead portion and a lower shield seed film (NiFe) under the associated stud. The diffusion stop films and are Ta films with a thickness of 5 nm or preferably at least 10 nm.
1. A magnetic head slider comprising: a slider body; a magnetic head formed on a trailing end surface of the slider body; a heater which is disposed near the magnetic head and comprises a heating portion, terminal portions extended respectively from the opposite ends of the heating portion and lead portions stacked respectively on the terminal portions; studs, each of which is formed on an end of the associated terminal portion via a seed film; and diffusion stop films, each of which is disposed between the associated terminal portion and lead portion or between the associated lead portion and seed film.
2. A magnetic head slider according to claim 1 wherein a sheet resistance of the diffusion stop films is lower than that of the heating portion and than that of the terminal portions.
3. A magnetic head slider according to claim 1 wherein a thermal expansion coefficient of the diffusion stop films is smaller than that of the heating portion and than that of the terminal portions.
4. A magnetic head slider according to claim 1 wherein the heating portion and the terminal portions are made of NiCr or NiFe, the lead portions are made of Cu or Au, and the diffusion stop films are made of Ta, Cr or NiCr.
5. A magnetic head slider according to claim 1 wherein a thickness of the terminal portions is about 100-200 nm, the thickness of the lead portions is about 150-250 nm and the thickness of the diffusion stop films is about 5 nm or thicker.
6. A magnetic head slider according to claim 1 wherein a resistance of each lead portion is not higher than a fifth that of the heating portion and the associated terminal portion.
7. A magnetic head slider according to claim 1 wherein a resistance of the heating portion and terminal portions is about 200-600 Ω while the resistance of the lead portions is about 3-60 Ω.