Perpendicular magnetic recording medium and manufacturing method thereof
View Patent ↗Embodiments of the present invention provide a perpendicular magnetic recording medium with less medium noise, excellent overwrite characteristics, and scratch resistance. According to one embodiment, when an Ar gas with addition of a micro-amount of oxygen is used upon forming an upper Ru intermediate layer, a micro-structure of a magnetic layer formed thereon can be formed in a state where no magnetic oxide region is segregated and the magnetic crystal grains are isolated. In this case, a gas pressure for forming the upper intermediate layer is set to 5 Pa or more and 12 Pa or less which is a region much higher compared with 0.5 Pa or more and 1 Pa for the lower Ru intermediate layer. Since writing by a head becomes difficult remarkably in the perpendicular magnetic medium having magnetic crystal grains promoted for isolation, a second magnetic layer for facilitating magnetization reversal by lowering the oxide concentration and somewhat strengthening coupling between particles only in the magnetic layer on the side of the surface is formed to a layer above the first magnetic layer as a main part.
1. A perpendicular magnetic recording medium comprising:
a substrate;
a soft magnetic layer formed above the substrate;
a second intermediate layer formed above the soft magnetic layer and containing Ru;
a third intermediate layer formed on the second intermediate layer, including Ru as a main ingredient, and containing oxygen;
a first magnetic recording layer formed on the third intermediate layer and having crystal grains with a boundary and an oxide; and
a second magnetic recording layer formed on the first magnetic recording layer with the concentration of an oxide being lower compared with that of the first magnetic recording layer,
wherein the crystal grains of the first magnetic recording layer are epitaxially grown above Ru crystal grains of the third intermediate layer, and
wherein a first intermediate layer for controlling the crystal structure of the second intermediate layer is provided between the soft magnetic layer and the second intermediate layer.
2. The perpendicular magnetic recording medium according to claim 1 , wherein the first magnetic recording layer includes Co as a main ingredient and containing SiO 2 , and the second magnetic recording layer includes Co as a main ingredient and has a film thickness of 4 nm or more.
3. The perpendicular magnetic recording medium according to claim 1 , wherein the first intermediate layer contains Ni—W.
4. The perpendicular magnetic recording medium according to claim 1 , wherein an amorphous seed layer is provided between the soft magnetic layer and the first intermediate layer.
5. The perpendicular magnetic recording medium according to claim 4 , wherein the amorphous seed layer contains Cr—Ti.